Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Kokusai Electric Co., Ltd Zestone-V(B) DD-1205V

Asset ID: 12681

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Kokusai Electric Co., Ltd

Zestone-V(B) DD-1205V

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2003 July

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Other Missing or damaged parts: Not reported.



Equipment Type: Z-5


Process: Doped polysilicon

Heater: Carry

Process Condition: LP

Maximum Operating Temperature(C):850℃

N2 Load Lock:Load lock type N2 substitution

Qty. of Production Wafers: 100

Boat Operation (Handling Position): 1 Boat Type / 1 Boat Operation (B/E)

Gas(SLM):SiH4(4.000);PH3-1(0.300);N2-1(30.000):N2-2(0.500):N2-3(10.000):N2-4(5.000):N2-5(5.000):LLP-N2(200.000):O2(5.000):Clf3(5.000)

Gas(sccm):PH-2(50.000):PH-3(50.000):PH-4(50.000):PH-5(50.000)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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