Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Aviza Technology, Inc. RVP-300

Asset ID: 11784

Print spec sheet

Aviza Technology, Inc.

RVP-300

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 3/12/2021

Process: ANNEAL


Tool config is based on original PO, please verify tool details at tool inspection


System, General Specification

Heater element Model   FURNACE,ATM -APL

Process Condition   AP

Maximum Operating Temperature   1200c

N2 Load Lock   Yes

Wafer Type   300 SEMI STD-Notch

Qty. of Production Wafers   120 slots Ladder

Boat Operation   2 Boat Type

Software Version   AVP 2.7.1 V


System, Furnace

Loading Area Light   White   2

Force Air Cooiling system   installed   1

Side Maintenance   None   None

O2 Density control   0-100ppm   1

N2 Boat shower wafer cooling   None   1

Furnace Temperature Controller   SSPC control   9


System, Wafer/Carrier Handling

Carrier Type   12" FOUP

Carrier Stage Capacity   16 FOUP

WTU Type   GenMark

WTU alignment   GenMark

WTU Teaching method   Pre-aligner / dual beam


System, Gas Distribution

IGS Maker / Type   Fujikin

IGS MFC Maker / Type   AERA

IGS Press Transducer Maker / Type   Mykrolis


System, Exhaust Specification   

Vacuum Gage - 2 torr   AP tool 

Vacuum Gage - 10 torr   AP tool 

Vacuum Gage - 100 torr   AP tool 

Vacuum Gage - 1000 torr   AP tool 

Main Valve   AP tool 

Pump Maker/Model   AP tool 

Low vacuum valve   AP tool 

Trap   AP tool 

Vacuum Pressure Controller   AP tool 


System, Reactor   

Process Tube (LP)   None

Outer/Inner Tube Material (LP)   None

Inner Tube Type (AP)   Quartz Single

Inner T/C   12FT/HONEYWELL

Boat Materail/Type   Sic

Boat Rotation   None

Pedestal Materail/Type   Quartz

Auto Shutter   installed


System, Power Distribution   

Voltage 3phase   480VAC

Voltage Single-phase   None

Frequency   60Hz 


System, User Interface   

Operation Panel   Keyboard & Screen

Indicator Type   Mouse

Operation software type   Linux


Gas Leak Detector   

Gas Leak Detector Materail/Type   GasTech


System, Fixture List, Gas   

IGS maintenance Fixture   None

Vacuum Gauge   None


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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