Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Ebara FREX300S2

Asset ID: 208468

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Ebara

FREX300S2

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: 1/1/2022

Tool ModelFREX 300s 
ProcessWCMP 
Software Version11.5 
System Power Rating 208v 3 Ø 60Hz 
Loading Configuration3 load ports 
 DescriptionChemicals / Gases Used
Chm Position   1Slurry AW7300-A18
Chm Position   2Slurry B 
Chm Position   3Slurry CD9228
Chm Position   4Slurry D 
Chm Position ___Cleaner 10.063% TMAH
Chm Position ___Cleaner 2HF 100:1
Chm Position ___Cleaner 3D9228

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