Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

P.S.K. Tech Inc. Supra IV

Asset ID: 12249

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P.S.K. Tech Inc.

Supra IV


Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: STRIP

Tool config is based on original PO, please verify tool details at tool inspection

Main Body
Load Port- Fixed Buffer: Qty    3
System wide corrosion free:Yes(SUS304)    
Wafer Breakage Detection        
LCD Monitor:VX1500M-T    

System Controller
CPU    Pentium 4
Hard disk    80GB
1st data back-up    3.5" FDD
2nd data back-up    CD-RW
Operation Monitor    15" LCD
Signal Tower    4 color Dual Polemount Type
R.C.S(Remote Control System)    

Main Power    3ψ 208VAC 60HZ 250A
UPS Power    1ψ 208VAC 60HZ 63A
Power Vaccine    1sec
Electric & signal cable Length    20M
 UPS Battery    YES
Circuit Break Type    MCCB Type
Water Manifold valve    Shut off v/v
All Utility Feed Direction    Bottom-up feed

Transfer module
TM ROBOT Body        1    SR8232-0003AAR
TM ROBOT Controller        1    SC3150
TM ROBOT Power box        1    
EFEM ROBOT        1    SR8240-0001AAS

Chamber 1 & 2
Dry Pump            
APC valve        1    653B-4-100-2
APC Controller        1    651C-26831
Baratron Sensor        1    626A02TBE
Pressure Transducer (pirani)        1    750B13TCD2GG
EPD Controller        2    NEFL-309S
Heater Module        2    
PICP        2    5284-3930020-C-S
Generator        2    AX7690PSK-04
Gas Box    IGS Type    1    
Pressure Control    Throttle Valve    1    

Chamber 1 & 2 process gas line
GAS #1(O2)    10slm    1    TCFC-PA786CT-BF
GAS #2(N2)    3slm    1    TCFC-PA786CT-BF
GAS #4(NH3)    5slm     1    TCFC-PA786CT-BF
GAS #4(H2N2)    5slm     1    TCFC-PA786CT-BF
Purity    10RA    1    
MFC Signal    Digital    1    
Gas Line Polishing    Electrical Polished    1    
Regulator        6    
Air Operated Valve        6    
Filter        1    
Pressure Transducer        6    
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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