Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 12/24/2021
Process: SWC
Tool config is based on original PO, please verify tool details at tool inspection
Process module: HF; Poly (HF+HNO3)
Transfer station: ASYST load port; Brooks robot(Dual arm robot)
Sub-unit: CDS (Chemistry Dispense System)
Transfer Configuration
-Carrier transfer
Carier port*3, Tag reader *3
Port door*3, motor*3
Safty light curtain*2
Wafer transfer
Brooks robot:Dual arm robot
Robot linear module
Flip station*2: left & right
Main body
Left ECO:motor*2
Right ECO:motor*2
ECO linear module
chuck: motor*1
elevator: motor*1
dispenser*4, motor*4 & cylinder*2
Tank: HF
Mixture 1: HF
Process tank material: PVDF
Buffer tank material : PVDF
Process temp: 60℃
Heating method: in-line heater (6KW)
Exhaust method: Manual damper
Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)
Return Punmp: Diaphragm pump, model 110
Tank level sensor: ifm electronic (KN5115)
Drain method: pump drain (membrane pump A 10 TTZ )
Drain line: 2 lines
Chemistry tube material: PFA
Tank: Poly
Mixture 1:HF
2: HNO3
Mixing ratio: HF+HNO3
Process tank material: PVDF
Buffer tank material : PVDF
Process temp: 25℃
Heating method: in-line heater (6KW)
Exhaust method: Manual damper
Concentration meter: HORIBA (CS-153)
Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)
Return Punmp: Diaphragm pump, model 110
dosing pump: METERING PUMP (PZ10)
Paddle wheel: Flowmeter, paddle wheel
Tank level sensor: ifm electronic (KN5115)
Drain method: pump drain (membrane pump A 10 TTZ )
Drain line: 2 lines
Chemistry tube material: PFA
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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