Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 208490

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Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2016

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 6/25/2021

PVD - 11-3AMAT_ENDURA2_CO_01 - COBALT


Tool config is based on original PO, please verify tool details at tool inspection


Mainframe

Frame Type: E2 300MM ENDURA

Software Version: CPCI B50140

Load Lock Type: Single wafer load lock

Robot Blade Type: ACB

Transfer Blade Type: ACB

Cryo: CTI, On Board

Cryo Compressor: IS1000

Heat Exchanger: DAIKIN

Chm Position 2: Cobalt, Chemicals / Gases Used: N2,Ar

Chm Position 3: Cobalt, Chemicals / Gases Used: N2,Ar

Chm Position 5: Cobalt, Chemicals / Gases Used: N2,Ar

Chm Position C: PCXT, Chemicals / Gases Used: N2,Ar

Chm Position D: PCXT, Chemicals / Gases Used: N2,Ar

Chamber Position: E, F, Process Type: Dual Mode Degas

Chamber position: A, B, Process Type: Cool


DEGAS chamber

Chamber Position: E, F

Process Type: Dual Mode Degas

Pump, Turbo - Adixen: CTI, On-Board


Cool chamber

Chamber position: A, B

Process Type: Cool


Process Type: Reactive PC

Chamber position: C,D

Shutter option: none

chamber body (Al or SST): Al

chamber body part number: 0040-76718

Slit valve seal (bonded or o-ring): bonded

Slit Valve door part number: 0040-84391

Target vendor: n/a

Target No.: n/a

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): n/a

AMAT Part number Master: n/a

OEM Part Number Master: n/a

AMAT Part number Slave: n/a

OEM Part Number Slave: n/a

Generator Size : n/a

Total DC (12 kwh,24kwh, etc): n/a

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: 13.56MHz and 2MHz(in one generator)

Rf coil generator: COMDEL CDX-2000

AMAT Part number : 0190-23308

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): n/a

Magnet type: n/a

Magnet part number: n/a

adaptor p/n: n/a

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: Belljar 0040-55456

Treatment (Arc spray/Bead Blast): Al2O3

Treatment roughness (RA): n/a

lower shield p/n: 0040-86514

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

inner(or mid) shield p/n: 0021-19342

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

shield clamp p/n: 0020-19258

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: Insulator 0200-01903

Treatment (Arc spray/Bead Blast): Al2O3

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal type: n/a

pedestal p/n: n/a

Lift fingers p/n: n/a

Lift hoop p/n: n/a

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): n/a

Cryo gate valve (2/3 pos): Pendulum

MFC 1 Gas: He

MFC 1 Cal Factor: 1

MFC 1 Size: 300

MFC 1 Type: He

MFC 1 Part Number: 0010-44160

MFC 2 Gas: Ar2

MFC 2 Cal Factor: 1

MFC 2 Size: 200

MFC 2 Type: Ar

MFC 2 Part Number: 3030-13113

MFC 3 Gas: Ar

MFC 3 Cal Factor: 1

MFC 3 Size: 20

MFC 3 Type: Ar

MFC 3 Part Number: 3030-13116

MFC 4 Gas: (MFC6) H2

MFC 4 Cal Factor: (MFC6) 1

MFC 4 Size: (MFC6) 100

MFC 4 Type: (MFC6) H2

MFC 4 Part Number: (MFC6) 0015-02990

Chamber base pressure (T): 0.0000002

Chamber Rate-of-Rise(nTorr/min): 15000

Press. and ROR at Startup: not necessary

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 34.7

Process N2 Supply Pressure: 33.9

Cryo Regen N2 pressure: na

Vent Ar pressure: 47.7

Optional Gas (He): 30.1

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 95.7

SLIT VALVE CDA: 85

Cooling Water Flow (GPM): 0.8


Process Type: Cobalt

Chamber position: 2,3,5

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0040-98657

Slit valve seal (bonded or o-ring): bonded

Slit Valve door part number: 0040-84391

Target vendor: NIKKO

Target No.: TAG169

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): MKS

AMAT Part number Master: 0190-23736

OEM Part Number Master: n/a

AMAT Part number Slave: n/a

OEM Part Number Slave: n/a

Generator Size : 10kw

Total DC (12 kwh,24kwh, etc): 10kw

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: n/a

Rf coil generator: n/a

AMAT Part number : n/a

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): 55

Magnet type: ALPS CO

Magnet part number: 0010-51232

"adaptor p/n: 0240-29326 KIT, ADAPTER, ALPS CO, 

300MM ENDURA BLUE

adapter:0040-62882"

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: DARK SPACE SHIELD 0021-18068

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

lower shield p/n: 0020-48185

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

inner(or mid) shield p/n: 0040-76737 (Ground ring)

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: 0200-20437

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: 0021-22177

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: 0021-26565

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

pedestal type: HT-ESC

pedestal p/n: 0010-27430

Lift fingers p/n: 0020-46828

Lift hoop p/n: 0020-75465

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): n/a

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: AR

MFC 1 Cal Factor: n/a

MFC 1 Size: 100

MFC 1 Type: AR

"MFC 1 Part Number: Brooks

(can not see P/N)"

MFC 2 Gas: AR

MFC 2 Cal Factor: n/a

MFC 2 Size: 20

MFC 2 Type: AR

"MFC 2 Part Number: Brooks

0010-42843"

MFC 3 Gas: n/a

MFC 3 Cal Factor: n/a

MFC 3 Size: n/a

MFC 3 Type: n/a

MFC 3 Part Number: n/a

MFC 4 Gas: n/a

MFC 4 Cal Factor: n/a

MFC 4 Size: n/a

MFC 4 Type: n/a

MFC 4 Part Number: n/a

Chamber base pressure (T): 5.00E-8 Torr

Chamber Rate-of-Rise(nTorr/min): 2000nTorr/min

Press. and ROR at Startup: Ch2/3/5:Press:2.20E-08Torr  ROR:2xx nT/min

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 32psi

Process N2 Supply Pressure: n/a

Cryo Regen N2 pressure: 78

Vent Ar pressure: n/a

Optional Gas (He): n/a

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 78

SLIT VALVE CDA: 77

Cooling Water Flow (GPM): CH2:8 CH3:10 CH5:11


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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