Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Ulvac Corporation Entron-EX

Asset ID: 207147

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Ulvac Corporation

Entron-EX

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2017

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Vendor Tool Serial #  ME16-9603  
Date of Tool Move-In  1-Jun-17  
Tool Model  Entron EX  
Process  MATY  
Software Version  v357-15  
System Power Rating   AC208V 3φ 50/60Hz  
Loading Configuration  3 Load Ports  
   DescriptionChemicals / Gases Used
Chm/Unit Position   F1  Normal - CarbonCarbonAr
Chm/Unit Position   F4  Normal - CarbonCarbonAr
Chm/Unit Position   R1  Normal - Carbon NitrideCarbonAr, N2
Chm/Unit Position   R2  RF - MATYMATYAr
Chm/Unit Position   R3  RF - MATYMATYAr
Chm/Unit Position   R4  Normal - CarbonCarbonAr
Chm/Unit Position   B1  Degas N/A
Chm/Unit Position   B2  Degas N/A
Chm/Unit Position   LLA  Load Lock N2
Chm/Unit Position   LLB  Load Lock N2
Tool Frame with 2 RF Sputter Ch, 4 Normal Sputter Ch, 2 Degas Ch   
Legacy EFEM     
On Board Maintenance Crane     
MPD Racks x3, Utility Rack x1     
RF chambers contaminated with toxics (MATY)    
H2S fliter on back of EFEM intake    
Acess ladder added to frame by Fab logistics (isntalled at B1/B2 location)   
2nd source KVM installed     


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