Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
PVD (Physical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Tool Status: Deinstalled and moved to the warehouse.
Section 1. Tool General Information
Micron MISTI # MMEN6T1200
Vendor Tool Serial # 428702
Date of Tool Move-In 12/11/2014
Tool Availability Date 11/7/2019 (2x Cu Chambers)
Tool Current Status In production **(2x Cu Chambers=De-installed)
Tool working condition Working
Tool Location F6 Warehouse (2x Cu Chambers)
Section 2. Tool Specific Information
OEM Applied Materials
Tool Model Endura2
Process TSV
Software Version 2.10_440
System Power Rating 480VDC/3-Phase/320A
Loading Configuration 3 loadports
Any equipment manuals available? No
Tool under OEM service contract? No
For multi-chms system, please indicate the chamber type & include photo of individual chm
(Section is also applicable to tank configuration for Wet bench)
Description Chemicals / Gases Used Photo Attached
Chm Position 1 No
Chm Position 2 No
Chm Position 3 Ventura Cu Ar No
Chm Position 4 Ventura Cu Ar No
Chm Position 5 No
Chm Position ___ Yes / No
Chm Position ___ Yes / No
Section 3. Missing/Defective/Cannibalized Parts & Subsystems not sold with tool
Description Missing (Qty) Defective (Qty) Cannibalized (Qty) Subsystems not to be sold with tool (Qty)**
"Chiller Integration Kit 0246-02299" 2 NA NA NA
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.