Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
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Centris SYM3X Poly - Chamber Only
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Boise, United States
Available date: Currently Available
APPLIED MATERIALS CENTRIS SYM3 CHAMBER ONLY
OEM: APPLIED MATERIALS
MODEL: CENTURA CENTRIS POLY, CHAMBER ONLY
| Section 1: Tool General Information | ||
| Micron MISTI/LID # | ASC34575C2 | |
| Vendor Tool Serial # | 431873 CH3 | |
| Date of Tool Move-In | 2016-06-13T06:00:00Z | |
| Tool Excess Date | 8/25/2021 | |
| Tool Current Status | Deinstalled | |
| Tool Location | Warehouse | |
| Any modification/ conversion/ refrofit was perform to the tool? | No | |
| Any defective or missing parts | Yes | |
| Section 2: Tool Specific Information | ||
| OEM | AMAT | |
| Tool Model | SYM3X | |
| Software Version (include revision #) | NA | |
| System Power Rating | 208VAC 3phase | |
| Loading Configuration | NA | |
| Tool under OEM service contract? | No | |
| Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc) | ||
| Part Type | Part Description | |
| 1 | NA | |
| 2 | ||
| 3 | ||
| For multi-chms system, please indicate the chamber type of individual chm, do not use Micron Proprietary names for Chemical/Gases | ||
| (Section is also application to tank configuration for Wet bench) | ||
| Chamber Description | Chamber Chemicals Gases Used | |
| Chamber C2 | SYM3X | O2,CL2,COS,HBR,SICL4,SF6,CH2F2,SO2,C4F6,H2,NF3,CHF3,CF4,HE,AR,N2 |
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| Chamber | ||
| *All OEM cable connecting between FAB to SubFab are required to be list out (Include length in mm) | ||
| Cable Description | Length | |
| 1 | CABLE, ASSY, PUMP UMBILICAL, SIGNAL, 100FT | 30480 |
| 2 | CABLE ASSEMBLY, PUMP EMO 100FT, CEN AP | 30480 |
| 3 | CABLE ASSEMBLY, EMO JUMPER | 30480 |
| Non-OEM Parts Description | ||
| Tool | Model | |
| 1 | NA | |
| 2 | ||
| 3 | ||
| Section 3. Missing / Defective | ||
| Description | Missing (Qty) | Defective (Qty) |
| 0190-53527 - GEN RF 13.56 MHZ, 1.5KW PARAMOUNT 1513, 3PHASE 208 - CIP | 1 | |
| 0190-53530 - GEN RF 2MHZ, 5.0KW PARAMOUNT MF 5002, 3PHASE 208 | 1 | |
| 0190-53528 - GEN RF 13.56 MHZ, 3.0KW PARAMOUNT, 3PHASE 208, HP Centris - CIP | 1 | |
| Section 4. N2 Load Port Configuration | ||
| N2 Load Port Exists | N2 Load Port Vendor | OEM Stage Available |
| No | ||
| No | ||
| Section 5. For CVD/Dry Etch - Gas/Chem Configuration | ||
| Optional Gas | Custom Gas Lines | TOR |
| O2_IGI 70sccm D514 | NA | O2 (IGI) 100sccm D514M |
| not present sccm | NA | C4F6 IGI 40 Sccm GFC125 |
| CL2 800sccm D514 | NA | Cl2 1200sccm D514M |
| COS 200sccm D514 | NA | Cl2 100sccm D514M |
| HBR 600sccm D514 | NA | COS 300 Sccm GFC125 |
| SICL4 120sccm GF125CXXC | NA | SiCl4 (Heated) 120sccm GF125 |
| SF6 50sccm D514 | NA | SF6 50sccm D514M |
| O2_LO 60sccm D514 | NA | O2 60sccm D514M |
| not present sccm | NA | HBr 600sccm D514M |
| CH2F2 100sccm GF125CXXC | NA | CH2F2 100sccm D514 |
| SO2 400sccm GF125C | NA | SO2 400sccm D514 |
| C4F6 60sccm GF125CXXC | NA | C4F6 60sccm GFC125 |
| H2 100sccm GF125CXXC | NA | MFC ready only |
| NF3 500sccm GF125CXXC | NA | NF3 500sccm D514M |
| CHF3 300sccm GF125CXXC | NA | CHF3 - 300sccm D514 |
| CF4 300sccm D514 | NA | CF4 300sccm D514M |
| HE 1000sccm D514 | NA | He 1000sccm D514M |
| O2_HI 700sccm D514 | NA | O2 700sccm D514M |
| AR 1000sccm D514 | NA | Ar 1000sccm D514M |
| N2 400sccm D514 | NA | N2 400sccm D514M |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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