Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer Etch eXT Poly

Asset ID: 207450

Print spec sheet

Applied Materials (AMAT)

Producer Etch eXT Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 8/6/2021

11-3AMAT_PREXT_OX_03

Dry Etch


Tool config is based on original PO, please verify tool details at tool inspection


Software Version: B3.0_52


Chm Position 1: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2

Chm Position 2: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2

Chm Position 3: PRODUCER Chemicals / Gases Used: Cl2, CHF3, CF4, O2


Remote Components

Cathode chiller:SMC-496 Qty 3/ 208 AC 3-Phase (not include with tool sales)

Wall chiller:SMC-H2000 Qty 1/ 208 AC 3-Phase (not include with tool sales)


Standard Spec

Software Revision: VERSION 2.5

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Load Port: 3 Loadport

Interface A: Hardware related to EDA

Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch

Facility Plate: Manual Valve : Supplied by customer in floor

Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor

Anti-corrosion Package: Enhanced Corrosion abatement material for FI

Anti-corrosion Package: Side Storage Pods (Left)

Anti-corrosion Package: Exhaust Mid Deck and Plenum for FI

Anti-corrosion Package: Heated SWLL

Loader Mod Corrosion Preventio: TDK Corrosion Resistant

Fittings: No brass fittings

Loadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187

Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187

Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249

Signal Tower: KIT, 4 LIGHT, DNET CONFIGURABLE LIGHT TOWER, 5.3 F

EMO: Front x3, Rear x3

Cable Length: RF SOURCE CABLE TRU-9957-07, RF BIAS CABLE TRU-9958-21

Cable Length: Monitor 1/2 cables : 25 ft (16 ft effective, AMAT#0395-00104)

Cable Length: Pump Cable : 75 ft

Monitor: Monitor-1 : Flat Panel with Keyboard on Stand (AMAT#395-00099)

Monitor: Monitor-2 : Flat Panel with Keyboard on Stand (AMAT#0395-00099)

IPUP: Alcatel IPUP , P/N 0190-22363

Inter Locks: On board interlocks to dissable RF and gas flow at half atmosphere, lid or gas panel door open, and H2 over press.

Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.


Supporting Remote

Etch Common AC Rack: Lean AC Rack

Heat Exchanger WALL: H2000 Heat Exchanger Wall

Heat Exchanger CATHODE: SMC 496 Heat Exchanger Cath (new DI -solenoid valve with new tolerance)

HX Control Cable Length: 75 Feet

Heat Exchanger Hose Length: 75 Feet

Water Box: Water Box

Source RF Generator: Apex 2760 2.7KW 60 Mhz

Source RF Matcher: RF MATCH, 60 MHZ, 5 KV, 50 A AE NAVIGATOR 2060, PRODUCER ETCH SOURCE

Bias RF Generator: Apex 5513 5.5Kw 13.5Mhz

Bias RF Matcher: RF MATCH, 13.56 MHZ, 4 KV, 50 A AE NAVIGATOR 5513, PRODUCER ETCH BIAS

ESC high Voltage Power Supply: CT HV MODULE ASSY. 5KV, CESC

Mainframe Robot: VxP w/DP blade and 3 Pt orings

OCR: KA3 backside OCR kit

OCR: KA3 backside Camera

Orienter: Prealigner kit

Orienter: Prealigner

Soft chuck: Soft chuck on pre-aligner


Hardware Config

Process Chb.1,2,&3: Producer eXT Poly Process 


Chamber Config

Electrode: Y2O3 GDP Dual Zone

He Control: Single Zone

Cathode Outer Cover: None

Cathode Sleeve: KIT, Cathose Sleeve Y2O3 (full coat)

Endpoint type: H.O.T. Pack

Slit Valve Liner Door: KIT, Slit Cover Door with Y2O3, Producer Etch XT

Oring for Slit Valve: 8575 Kalrez

Hoop Assy: New Hoop Assy

Lift Pins: New Lift Pins

Turbo screens: Removable Turbo Screens

He Dump Kit: He Dump Kit

Chamber Divider: Installed

TMP: KIT SEKIO SEIKI STP-F2203C 

Pump Cable Length: 75" Pump Interface Cable

Dry Pump Interface: Pump Interface Cable

Dry Pump Breaker Amp: 40A

Gas Break: Spiral 0040-54702 (electrode assy)

Gas Break O-ring: Gas Break O-ring

Pressure Monitor: Service : SXDCRPRESS 100TORR 1/2FVCR 0-10V OUT       0.5%ACC 9P-D

Pressure Monitor: Process Chamber : XDCR PRESS 1TORR 1/2FVCR 15P-D               45DEG-C MANOMETER

Pressure Monitor: ATMOSPHERE SWITCH: MKS 760 torr switch

Pressure Monitor: 1/2 ATMOSPHERE SWITCH: MKS 75 torr switch

Pressure Monitor: FORELINE : Manometer


Gas Box Config

Gas Pallet: ASSY, FULL 6/6 PALLET, 300MM ETCH NEXT GEN

Regulators: Regulator on SLD for inlet to gas panel (1 per unique gas, 12 max, VCR connection)

Transducers: Transducers inside MFC's

Device Net MFCs: Unit 125 Multiflo PTI

Filters: MYKROLIS (nickel, VCR)

Filters: Nippon (VCR 12 max)

FRC Location: at Gas Panel (setting = 1000/1000)

Gas Panel Exhaust: TOP EXHAUST

Gas Panel Facilities Hook Up: SINGLE LINE DROP

Piping: Standard high purity stainless & Exhaust through Gas box)

H2 Gas Leak Detection Port: H2 Gas leak detect board circutry supplied for use with external(with interface to customer-supplied toxic gas leak detectors)

Final Pressure Switch: At 600 Torr from gas pallet, at chambers 75 torr


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.