Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool is config with ETERNA TWIN Chamber A & ETERNA2 UV cure TWIN Chamber B & ETERNA TWIN Chamber C
Basic System : F11 SAXC002
Technology: DCVD
Platform Type: Producer GT
System Software
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0
Mainframe Configuration
Robot type: 0190-37624
Robot Blades: 0200-08347
LL preheater: 0090-05793
slit valve door: 3870-05037
MF pump: EBARA EV-100
LL pump: EPX180L（EDWARDS）
Diffucer: 0190-37371
FCVD Chamber Configuration
Chamber Type: FCVD CHA/C
Blocker: N/A
Liner: 1 Piece
Pedestal: 0010-42919
Slit Valve: 3870-05037(KALREZ 9100)
Filter: N/A
Foreline: 6in
Foreline TV: 3870-06440
Foreline ISO: 3870-06045
Gas box: N/A
Dome: 0041-26595
Baffle : 0021-84368
FACEPLATE: 0041-35370
BLOCKER(gas feed block): 0041-07625
PUMPING LINER: 0021-64960
LINER CERAMIC TOP: 0021-82788
LINER CERAMIC MIDDLE: N/A
LINER CERAMIC BOTTOM(edge ring): 0021-85102
CERAMIC ISOLATOR: N/A
LIFT PINS, FLOATING: 0200-08020
LIFT HOOP: 0200-08334
RPS: 0190-40602
Gas Pallet Type: ETERNA FCVD GT Twin Pallet
Gas Box Configuration
Line 1: N2 PURGE
Line 2: NF3 - 10.0SLM
Line 3: AR - 10.0SLM
Line 4: O2 - 250SCCM
Line 5: O2 - 2.5SLM
Line 6: N2 PURGE
Line 7: TSA - 1.0SLM
Line 8: HE - 5.0SLM
Line 9: EMPTY
Line 10: N2 PURGE
Line 11: NH3 - 700SCCM
Line 12: NH3 - 700SCCM
Line 13: EMPTY
Line 14: H2O - 1.0G
Line 15: AR - 5.0SLM
Line 16: EMPTY
Line 17: EMPTY
Line 18: EMPTY
Line 19: EMPTY
Line 20: EMPTY
Line 21: EMPTY
Line 22: N2 PURGE
UV Chamber Configuration
Chamber Type: UV Hybrid
LAMPHEAD ASSEMBLY (DUAL): 0190-46008
INNER PRIMARY REFLECTORS (x2): 0200-09730
OUTER PRIMARY REFLECTORS (x2): 0200-09728
UV BULBS (MERCURY BULB x2): 0195-04092
LAMPHEAD ENCLOSURE SEAL: 0021-28691
LAMPHEAD TRAY: 0021-44280
LAMPHEAD TRAY MOUNTING SEAL: 0021-32043
PULLEY ASSEMBLY (ROTATING WHEEL): 0010-44199
LOWER DYNAMIC SEAL: 0190-31840
LOWER CLAMP RING: 0021-33232
SECONDARY REFLECTOR ASSEMBLY: 0041-43990
HOME SENSOR (SIDE 1 ONLY): 0150-18683
HOUSING: 0041-08307
UPPER WINDOW CLAMP SIDE 1: 0041-44565
UPPER WINDOW CLAMP SIDE 2: 0041-44968
QUARTZ WINDOW: 0200-05371 Hereaus (CIP Quartz)
LOWER WINDOW CLAMP: 0041-44966
UPPER SHOWER HEAD: 0200-13516 Hereaus (CIP Quartz)
INTERMEDIATE SHOWER HEAD CLAMP: 0041-44967
LOWER SHOWER HEAD: 0200-13481 Hereaus (CIP Quartz)
LOWER SHOWER HEAD CLAMP: 0021-94083
RF DETECTOR: 0195-06361
LAMPHEAD ROTATOR: 3970-00044
CERAMIC TOP LINER : 0200-10913
INNER PUMPING LINER : 0200-10914
OUTER PUMPING LINER: 0200-10912
ALUMINUM FILLER: 0021-84795
CERAMIC MIDDLE LINER : 0200-13152
CERAMIC BOTTOM LINER : 0200-10944
LIFT PIN (Big foot): 0200-06110
WEIGHT (Big foot): 0200-05795
Ceramic Cap: 0200-05307
WASHER, WAVE, HAYNES: 0021-27777
EQUALIZATION PORT LINER: 0021-94377
PUMPING CHANNEL HUB: 0041-36422
PEDASTAL: 0041-33505
SLIT VALVE DOOR: 0246-18185(Chemraz XPE)
RPS: 0190-40602
UV POWER SUPPER: 0190-44835
Foreline pipeing size: 4''
Foreline TV / ISO COMBO VALVE: 0190-42409
Gas Pallet Type: BIMINI, YAD4, 7STK, REG, PROD GT
Gas Box Configuration
Line 1: Purge N2
Line 2: NF3, 5slm
Line 3: AR_CLN, 5slm
Line 4: NA
Line 5: AR_TOP, 35slm
Line 6: NA
Line 7: NA
Line 8: NA
Line 9: O3 DIVERT
Line 10: O3, 30slm
Line 11: AR_BTM, 10slm
Line 12: AR_SH, 2slm
Line 13: NA
Line 14: NA
Line 15: NA
Line 16: NA
Line 17: NA
Line 18: NA
Line 19: NA
Line 20: NA
Line 21: NA
Line 22: NA
Heat exchanger
Heat exchanger 1: 0190-27732
Heat exchanger 2: 0190-27732
Heat exchanger 3 (For UV): 0190-32036
Ozone system:
O3 Generator: 0190-44053
O3 Controller: 0190-38637
Process Pump/Abatement
Pump CHA/C: iXH4550HT
Pump CHB: iXH1820
Scrubber: DAS ESCAPE DUO
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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