Macquarie Equipment Trading on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Sokudo Co., Ltd. RF-300A

Asset ID: 55298

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Sokudo Co., Ltd.

RF-300A

Multi Block (Resist Coater/Developer)

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available


Process: Track

MC Configuration (# COT/# DEV):  3 COT/ 5 DEV    
Wafer Direction (RtoL or LtoR):  L to R

Accessory                                 
AC Power BOX                                
   - AC Power Cable : 3 Phase

COATER Units                                
    1) Unit                                
        - Resist Nozzles (Qty):8                                
        - Resist Pumps (type): PDS 105C                                
        - EBR / RRC /                             
        - Temp/Humidity Sensor:  Y                                
        - PR auto exchange system:  Y                            
        - Photo resist temperature controll installed:  Y                            
        - Motor Flange temperature controll installed: Y

Develop Units                                
    1) 3-1 Unit                                                        
        - Rinse: Top rinse (qty nozzles) 1                                
        - Developer Temp control installed:  Y                                
        - Auto damper installed:  Y                                
        - Auto dummy rainse installed:  Y                                
            

All Units Q`ty                                
     - Coater units (Qty):    3                            
     - Develop units (Qty):    5                            
     - AHL units (Qty):3                                
     - P-RHP units (Qty):10                                
     - HP units (Qty):3                                
     - RHP units (Qty):3                    
     - CP units (Qty):6                                
     - ADH units (Qty):3                                
     - TRS units (Qty):4                                
     - WEE Units (Qty):2                                
     - PEB Units (Qty):4                                                        
     - IRA Block:  Y                            
     - CSB:  Y                                                    
     -TRS:  Y                

Tool Damage/Missing Parts: 
None report, pleasee inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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