Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Varian Semiconductor Equipment Associates (VSEA) VIISta 810

Asset ID: 209719

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Varian Semiconductor Equipment Associates (VSEA)

VIISta 810

Mid Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2001

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Need use the destructive methods to deinstallation the equipment.

Loading Configuration  FOUP

Number of Cassette/FOUP Positions is 4

Loadport Make/Model ASYST 300 OHT Transport (300mm)   

Date of Last PM is 2013/5

The system not On-Line

Off-Line Date is 2014

All Cables are Present 

GEM/SECS Interface

Standard Network Communication Capability   

Mid Current 810 Classic 

Energy Range is 270kv

Maximum Energy is 270kv

Dose Range is 1e11~1e13

Programmable Tilt Angle is 7

Tilter Head Revision is Type c

Bernas source

Dual Vaporizer  

Dimmer Magnet Turbo

Source Turbo

EndStation Turbo

Process Chamber Cryo (x3)

Scan Chamber Cryo

Gas Type

1.HP

2.SDS

3.SDS

4.SDS

Chiller is Included

Dry Pumps is Included

Dry Pump Make Model is IQDP80

Dry Pump Make Model is IQDP80-500

Cryo Compressors is Included   

Make Model is CTI

Quantity is 2

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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