Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Nissin Electric Co., Ltd. Exceed 3000

Asset ID: 209686

Print spec sheet

Nissin Electric Co., Ltd.

Exceed 3000

Mid Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: Mar. 2007

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 12/1/2021

IMPLANT 15-3NSIN_EX30_MC NISSIN EX30 MC

OEM  NISSIN ION EQUIPMENT
Tool Model  EXCEED3000AH
Process  IMPLANT
Software Version (include revision #) Ver2.7.6.15R6
System Power Rating  400VAC 3-Phase
Loading Configuration  1 Process Chambers
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  __Process Chambers______BF3/PH3/AsH3/InF3________________


ClassificationIMMCK38300IMMCK38300
SystemModelEXCEED3000AH G2EXCEED3000AH G2
VendorVendorNISSIN ION EQUIPMENT日新イオン機器
ProcessProcessMedium current ion implanter中電流イオン注入
MMMMIVer2.7.6.15R6Ver2.7.6.15R6
IC IC6EF2BGIC6EF2BG
BC BB30I156RBB30I156R
SC VER4.74MVER4.74M
EC Ver1.17Ver1.17
MaterialAr/Facility
 BF3/SDS
 PH3/SDS
 AsH3/SDS
 InF3/Solid
I/SI/S ChamberEX3000IHC TypeEX3000IHC
 Source HeadIHC-R2IHC-R2
 VapolizerUse有り
 Ext. ElectrodeIHC compatibleIHC対応
 Low Beam ApartureOne hole1つ穴
AMUMass SlitEX3000 TypeEX3000
 SAM pole peaceEX3000 TypeEX3000
 SAM pole linerNo use無し
 SAM Dump TileThickness肉厚
ACCACC TubeEX3000-CarbonEX3000-Carbon
 ACC Sup.EX3000 TypeEX3000
 ACC_PSSL220P2000X2696SpellmanSL220P2000X2696Spellman)単体交換可
A/L cylinderMechanical lockEX2300AH/3000AH Type
A/L1 Side
CLSF160-DCG2192G-143 
A/L2 Side 
CLSF160-DCG2191G-143
EX2300AH/3000AH
A/L1側 
CLSF160-DCG2192G-143 
A/L2側 
CLSF160-DCG2191G-143
A/L Sub cylinderSub cylinderEX3000G2 Type
RDQB40-XC10-DCK6456K
EX3000G2
RDQB40-XC10-DCK6456K
BSMBSM ChamberEX3000 TypeEX3000
Scan drive unitScan drive unitEX2300AH/3000AH TypeEX2300AH/3000AH
PFGPFGUse有り
 Xe gasExternal supply外部供給
ESCESCSilicon rubberシリコンゴム
 Adsorption voltage1000V1000V
V-lenzV-lenzNo use無し
 Load PortTAS300 TYPE E4
(TDK)
TAS300 TYPE E4
(TDK)
TransferATM RobotI-handDual) G2 Type
NS520S-A001(For AR1)
NS520S-B001(For AR2)
I-handDual) G2
NS520S-A001(AR1)
NS520S-B001(AR2
)
 ATM Robot cntG2 Type
30C67E-A001(For AR1)
30C67E-A002(For AR2)
G2
30C67E-A001(AR1)
30C67E-A002(AR2
)
 PLATEN MOTION CONTROLLER POWER UX-CM810PERCR-VD01-E100compatibilityERCR-VD01-E100ERCR-VD01-E100
 V-ArmEX3000AH G2 TypeEX3000AH G2
 A/L roughing valveEX3000AH TypeEX3000AH
 A/L vent filterEX3000AH TypeEX3000AH
PumpDP1AA10NAA10N
 DP2ACP28GACP28G
 DP3AA200NAA200N
 DP4No use無し
 DP5AA10NAA10N
 TP1TMP-1003MCTMP-1003MC
 TP2TMP-1003MCTMP-1003MC
 TP3TMP-1003MCTMP-1003MC
 CP1P-126CLP-126CL
 CP2P-126CLP-126CL
 CP3P-126CLP-126CL
 CP4P-086CLP-086CL
OTHERBack ShutterNo use無し

Missing or damaged parts: FAb15 confirmed there were no missing or damaged parts.



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