Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials Uvision 4

Asset ID: 54039

Print spec sheet

Applied Materials

Uvision 4

Brightfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: 2011

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by buyer.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


High resolution wafer inspection system 

Magfinication

190nm,140nm,100nm,70nm

DUV laser  class 4 laser

Wave length 266nm Power 230mW 

NA = 0.9

Zygo laser  class 2 laser

Wave length 632nm Power 1mW

Gas = Natrogen 80-100 psi Purity 99.999%

optics Path

Bright field, Gray field

Stage = XY axis . Theta-Z . Z



Other Missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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