Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2005-01-01
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process : WNS
Tool config is based on original PO, please verify tool details at tool inspection
OEM: TEL
Tool Model: EXPEDIUS+
Tank:DHF
Guide Material PCTFE
Process Bath Material PTFE
Temp. RT
Mixing Ratio (1) DHF 1:25
Replenishment
Level Yes
Recipe No
Pre/Post/Interval No
Batch Count 5
Feedback No
Bath Function
Bath Autocover Yes
Bath Cleaning Yes
Sampling Line Yes
Pump NSPH-55KML
Heater NES-3123-7
Filter IHAZ01P01K /0.05um
Conc. Monitor "CM-210 (for HF 1:25)
0~5% Scaling"
Drain Line
WD1 (HF Waste Water) Diluted DHF：WD1
WD11 DHF：WD11
Tank:H/C QDR
Guide Material PCTFE
Process Bath Material QUARTZ
Temp. RT, 70c
Bath Function
Over Flow Rinse Yes
Shower(Spray) Yes
Sampling Line Yes
Cold DIW (Facility) 40 ~ 60 L/min
Hot DIW (Facility) 40 ~ 60 L/min
Heater Facility
Drain Line
WD1 (HF Waste Water) Diluted DHF：WD1
WD3 (UPW Reclaim) DIW：WD3
Tank: H3PO4-1
Process Bath Material QUARTZ
Temp. 157℃
Mixing Ratio (1) 86%
Replenishment
Level Yes
Recipe Yes
Feedback No
Bath Function
Sampling Line Yes
Pump NSPH-55G-1
Heater "NISON KIT
C - Type"
Filter TGDGATXTH /0.2um*2
Conc. Monitor KIS-27
Drain Line
WD2 (Neutralization Waste Water Treatment) Diluted H3PO4：WD2
WD5 (H3PO4) H3PO4：WD5
Tank: H/C QDR
Process Bath Material QUARTZ
Temp. RT, 70c
Bath Function
Over Flow Rinse Yes
Shower(Spray) Yes
Sampling Line Yes
Cold DIW (Facility) 40 ~ 60 L/min
Hot DIW (Facility) 40 ~ 60 L/min
Heater Facility
Drain Line
WD2 (Neutralization Waste Water Treatment) Diluted H3PO4：WD2
WD3 (UPW Reclaim) DIW：WD3
Tank: H3PO4-2
Process Bath Material QUARTZ
Temp. 157℃
Mixing Ratio (1) 86%
Replenishment
Level Yes
Recipe Yes
Feedback No
Bath Function
Sampling Line Yes
Pump NSPH-55G-1
Heater "NISON KIT
C - Type"
Filter TGDGATXTH /0.2um*2
Conc. Monitor KIS-27
Drain Line
WD2 (Neutralization Waste Water Treatment) Diluted H3PO4：WD2
WD5 (H3PO4) H3PO4：WD5
Tank: H/C QDR
Process Bath Material QUARTZ
Temp. RT, 70c
Bath Function
Over Flow Rinse Yes
Shower(Spray) Yes
Sampling Line Yes
Cold DIW (Facility) 40 ~ 60 L/min
Hot DIW (Facility) 40 ~ 60 L/min
Heater Facility
Drain Line
WD2 (Neutralization Waste Water Treatment) Diluted H3PO4：WD2
WD3 (UPW Reclaim) DIW：WD3
Tank: SC1 (MS)
Guide Material PTFE
Process Bath Material PTFE
Temp. 63℃
Mixing Ratio (1) "1:4:130, 2:3:100
Circulation type"
Replenishment
Time 360
Level Yes
Recipe No
Pre/Post/Interval No
Batch Count 3
Feedback Yes
Bath Function
Bath Autocover Yes
Bath Cleaning Yes
Megasonic SSDM 2800W
Sampling Line Yes
Pump FF-20BT1
Heater AIH-124QS-T5
Filter QCCZATM01K /0.05um
Conc. Monitor CS-131 (1:4:130, 2:3:100)
Drain Line
WD2 (Neutralization Waste Water Treatment) "SC1：WD2
Diluted SC1：WD2"
Tank:POU
Guide Material TEFLON
Process Bath Material PTFE(POU)
Temp. RT, 70c
Mixing Ratio (1) HCL 1:500, 1:1000
Bath Function
Over Flow Rinse Yes
Shower(Spray) Yes
Resistivity Meter Yes
Sampling Line Yes
Cold DIW (Facility) 40 ~ 60 L/min
Hot DIW (Facility) 40 ~ 60 L/min
Heater Facility
Conc. Monitor CEH-480
Drain Line
WD2 (Neutralization Waste Water Treatment) "Diluted SC1：WD2
HCL：WD2
Diluted HCL：WD2"
WD3 (UPW Reclaim) DIW：WD3 (Fab1)
WD32 (Organic Waste Water) DIW：WD32 (Fab2)
Tank:SD2
Guide Material TEFLON
Process Bath Material PTFE
Temp. RT
Mixing Ratio (1) NA
Bath Function
Over Flow Rinse Yes
Bath Autocover Yes
N2 Purge Yes
Resistivity Meter Yes
Cold DIW (Facility) 40 ~ 60 L/min
Drain Line
WD1 (HF Waste Water) Yes
WD3 (UPW Reclaim) DIW：WD3
WD7 (Organic Waste Water) IPA：WD7
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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