Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Brooks Automation, Inc. MTX 4020

Asset ID: 209607

Print spec sheet

Brooks Automation, Inc.

MTX 4020

Wafer Sorter

Wafer Automation / Wafer Environment

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

AMHS 11-3BRKS_MTX4000_SORT_01CHGS11 BRKS MTX4000 SORT


ool Config: 114cmx170cmx238cm (LxWxH)

Main Body: Status Normal

Load Port 1, FIXLOAD V6: Status Damage

Load Port 2, FIXLOAD V6: Status Damage

Load Port 3, SWIVELLOAD: Status Normal

Load Port 4, SWIVELLOAD: Status Normal

Hander 1: Status Normal

Hander 2: Status Normal

Hander Controller 1: Status Normal

Hander Controller 1: Status Normal

Aligner 1: Status Normal

Aligner 2: Status Normal

Wafer ID Reader 1: Status Normal

Wafer ID Reader 2: Status Normal

FFU (Filter Fab Unit): Status Normal

Computer: Status Normal

Monitor: Status Normal

Keyboard: Status Normal


Damage/Missing parts list

Please refer to above tool details & inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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