Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)

Dainippon Screen Mfg. Co. (DNS) SS-3200

Asset ID: 209894

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SS-3200

Wafer Scrubber

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: August 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Boise, United States

Available date: Currently Available

System Power Rating 208 AC 3-Phase 60 Hz  
Loading Configuration4 Load Ports  
 DescriptionChemicals / Gases Used
Unit Position   1Unit 9NH4OH, H2O2, 0.063% TMAH
Unit Position   2Unit 10NH4OH, H2O2, 0.063% TMAH
Unit Position   3Unit 11NH4OH, H2O2, 0.063% TMAH
Unit Position   4Unit 12NH4OH, H2O2, 0.063% TMAH
Unit Position   5Unit 13NH4OH, H2O2, 0.063% TMAH
Unit Position   6Unit 14NH4OH, H2O2, 0.063% TMAH
Unit Position   7Unit 15NH4OH, H2O2, 0.063% TMAH
Unit Position   8Unit 16NH4OH, H2O2, 0.063% TMAH
Description   
Tool Frame with 8x chambers,    
    
Section 5. Missing/Defective Parts   
DescriptionMissing (Qty)Defective    (Qty) 
DIW Filters08 
MHU Tabs and plungers0All 
IHU Tabs and plungers0All 
Chuck Pins 0All 
Front Display GUI01 
DIW E-flow dissolution module 02 
TMAH Filters08 


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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