Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) TELINDY Nitride

Asset ID: 211099

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELINDY Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2007

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Section 1. Tool General Information 
Micron MISTI #TNITL26100
Vendor Tool Serial #L00007Z5268
Date of Tool Move-In3/11/2008
Tool Availability Date7/20/2022
Tool Current StatusIn production / De-installed 
Tool working conditionWorking / Not working with missing parts / Not working
Tool LocationFab16 DIFF A1 PHASE2
  
Section 2. Move-out constraint 
Any layout/move-out path constraintNo move-out path constraint
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap. 
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
  
Section 3. Tool Specific Information 
OEMTEL
Tool ModelALPHA-303i-K
ProcessMetal-SiN
Software VersionV2.13 Rev.006 [i00FFF-00006]
System Power Rating 208V AC 3-Phase
Loading Configuration2 load ports
Any equipment manuals available?No
Tool under OEM service contract? No


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