Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC
Date of Manufacture: 2015
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: 1/1/2022
Tool status: In production
Configuration: Audit to verify.
Diffusion - 02-3TEL_INDY_NIT_01LT - NITLT
| Section 1. Tool General Information | |||||||
| Micron MISTI/LID # | 1241610 | ||||||
| Vendor Tool Serial # | S00001565321 | ||||||
| Tool Current Status | In production | ||||||
| Tool working condition | Working | ||||||
| Tool Location | Fab2 Diffusion | ||||||
| Process | LTN | ||||||
| Software Version | V6.10 rev1 | ||||||
| 480VAC/120VAC 3 phase | |||||||
| Loading Configuration | 4 lot load | ||||||
| Any equipment manuals available? Yes | |||||||
| Tool under OEM service contract? No | |||||||
| Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc) | |||||||
| Part Type | Part Description : | Part number: | Date of Change: | Qty | Remark | ||
| Large Trap upgrade | Large TEL trap design | 810-140751 | 2018 | 1 | Includes heated SSV and heated hammer components | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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