Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Tokyo Electron Ltd. (TEL) TELINDY Plus Nitride

Asset ID: 208486

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Tokyo Electron Ltd. (TEL)

TELINDY Plus Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: 1/1/2022

Tool status: In production

Configuration: Audit to verify.


Diffusion - 02-3TEL_INDY_NIT_01LT - NITLT


Section 1. Tool General Information     
Micron MISTI/LID #  1241610    
Vendor Tool Serial #  S00001565321    
Tool Current Status  In production    
Tool working condition  Working     
Tool Location  Fab2 Diffusion    
        
Process  LTN    
Software Version  V6.10 rev1     
   480VAC/120VAC 3 phase    
Loading Configuration  4 lot load    
Any equipment manuals available?  Yes      
Tool under OEM service contract?   No      
        
Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)  
Part TypePart Description :Part number:Date of Change:QtyRemark  
Large Trap upgradeLarge TEL trap design810-14075120181Includes heated SSV and heated hammer components


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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