Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: May, 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tube Material: Quartz
Boat Material: Quartz
Production wafers: 100
Pressure control: APC Valve
Process Gas: NxTi(AMPLE system), TMA(F.S:500sccm), O3(F.S:20slm,200g/m3), N2,OCTANE
Vaporizer Maker: STEC(TMA,NXTi)
Vaporizer TYPE: LSC-F530(TMA)
MFC Maker: STEC
MFC Model: Z500series
Process Temp: 200-300 deg
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
Fab15’s shipping kits have been installed on an EXH Box and a 2nd GAS Box of the tool. The Fab15 shipping kits are required to return to Fab15.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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