Equipment details:
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 3/12/2021
Process: ANNEAL
Tool config is based on original PO, please verify tool details at tool inspection
System, General Specification
Heater element Model FURNACE,ATM -APL
Process Condition AP
Maximum Operating Temperature 1200c
N2 Load Lock Yes
Wafer Type 300 SEMI STD-Notch
Qty. of Production Wafers 120 slots Ladder
Boat Operation 2 Boat Type
Software Version AVP 2.7.1 V
System, Furnace
Loading Area Light White 2
Force Air Cooiling system installed 1
Side Maintenance None None
O2 Density control 0-100ppm 1
N2 Boat shower wafer cooling None 1
Furnace Temperature Controller SSPC control 9
System, Wafer/Carrier Handling
Carrier Type 12" FOUP
Carrier Stage Capacity 16 FOUP
WTU Type GenMark
WTU alignment GenMark
WTU Teaching method Pre-aligner / dual beam
System, Gas Distribution
IGS Maker / Type Fujikin
IGS MFC Maker / Type AERA
IGS Press Transducer Maker / Type Mykrolis
System, Exhaust Specification
Vacuum Gage - 2 torr AP tool
Vacuum Gage - 10 torr AP tool
Vacuum Gage - 100 torr AP tool
Vacuum Gage - 1000 torr AP tool
Main Valve AP tool
Pump Maker/Model AP tool
Low vacuum valve AP tool
Trap AP tool
Vacuum Pressure Controller AP tool
System, Reactor
Process Tube (LP) None
Outer/Inner Tube Material (LP) None
Inner Tube Type (AP) Quartz Single
Inner T/C 12FT/HONEYWELL
Boat Materail/Type Sic
Boat Rotation None
Pedestal Materail/Type Quartz
Auto Shutter installed
System, Power Distribution
Voltage 3phase 480VAC
Voltage Single-phase None
Frequency 60Hz
System, User Interface
Operation Panel Keyboard & Screen
Indicator Type Mouse
Operation software type Linux
Gas Leak Detector
Gas Leak Detector Materail/Type GasTech
System, Fixture List, Gas
IGS maintenance Fixture None
Vacuum Gauge None
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm
