Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ebara FREX300S Tungsten

Asset ID: 209802

Print spec sheet

Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 3/2--7

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Software Version (include revision #)Ver. 11.00
System Power Rating208 AC 3-Phase 
Loading Configuration3 load port
Vendor Chm ModelChemicals / Gases Used
Chm/Unit Position   1Polish unit slurry Slurry 
Chm/Unit Position   2Cleaner 1 unitTMAH 
Chm/Unit Position   3Cleaner 2 unitHF
Chm/Unit Position   4Cleaner 3 unitTMAH 
Process Unit:Model:Remark
Controller:
PLCMitsubishi8
Q25HCPU/Q17HCPU/Q172CPU
Robot DryXU-RCM9120+XU-ACL4150YASUKAWA1
Robot WetXU-RSM53D0YASUKAWA1
ME-10/20 Ver. 2.3.2.1.0EBARA End Point system1
Option chemicalsurpass & advance & SMC EBARA cleaner second Chemical line1
MFC/Pressure Unit:
REGULATOR (Roller pressure)EV2509-108-FL312697CKD6
E/P REGULATOR (DR pressure)ITV2020-02-4-X215SMC4
E/P REGULATOR (TR pressure)ITV2030SMC4
VACUUM REGULATORIRV1000-01BGSMC4
Drive Mechanisms:
TR Rotation driverMR-J2S-350BMitsubishi4
TR Swing driverMR-J2S-200BMitsubishi4
Dr rotation driverMR-J2S-10BMitsubishi4
Dr swing driverMR-J2-03B5Mitsubishi4
Turn table driverSGDH-1AAE-Y291YASUKAWA4
Cleaner roller rotation driverSGDS-01A32AYASUKAWA6
Cleaner stage rotation driverSGDS-01A32AYASUKAWA6
CLTP X&Z axis driverSGDS-02A32AYASUKAWA2
S/D rotation driverSGDS-10A32AYASUKAWA1




Missing parts:
DescriptionMissing (Qty)
T/O COVER (X-0001-473-1101)1
TOP CORNER COVER(2)(C)(C-3112-107-0001)1
Chamber C lamp
TOP CORNER COVER(2)(B)1
(C-3112-105-0001)
Chamber B lamp
BRACKET(B) (CHB&CHD atomizer)2
X-0001-561-3011
front side touch panel no display1



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