Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Dainippon Screen Mfg. Co. (DNS) SU-3200


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Asset ID: 210997

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Dainippon Screen Mfg. Co. (DNS)


Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: APR 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.

Tool's footprint is 2150mm x 5805mm. Also, Maintenance space 1000mm is required around the tool

Tool Model  SU3200
Process  DHF 1:300
Software Version (include revision #) V2.642STD00
System Power Rating  208AC 3-phase×2
Loading Configuration  4 load ports


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  MPC1___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   2  MPC2___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   3  MPC3___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   4  MPC4___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   5  MPC5___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   6  MPC6___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   7  MPC7___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   8  MPC8___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   9  MPC9___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   10  MPC10___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   11  MPC11___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   12  MPC12___________________DHF/_CO2Water/IPA__________________________
Chm/Unit Position   13  _EC1_______________________CC2;DHF=1300HFDIW__________________
Chm/Unit Position   14  _EC2_______________________CC3;DHF=1300HFDIW__________________
Chm/Unit Position ___  _EC3_______________________CC1;IPA__________________________

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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