Applied Materials Endura II Liner/Barrier

Equipment details:

Date of Manufacture: TBC

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed by a third party and is stored in an off-site warehouse.

PACKING LIST (SHIPMENT ITEMS LIST) AVAILABLE: PLEASE ASK YOUR SALES PERSON.

A HARD DISK DRIVE IS NOT INCLUDED IN TOOL.

[Chamber 2]

For Ti PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

HT ESC type stage

Ar;150/20sccm

[Chamber 3]

For TiN PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

A101 type stage

Ar/N2;150/200sccm

[Chamber 4]

For TiN PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

A101 type stage

Ar/N2;150/200sccm

[Chamber C]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm

[Chamber D]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm

[Chamber E]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled

[Chamber F]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled

Other missing or damaged parts: Not reported.