Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)

KLA-Tencor Corp. SpectraShape 8660

Asset ID: 211254

Enquire about this product Print spec sheet

KLA-Tencor Corp.

SpectraShape 8660

Optical Review System

Metrology Equipment

Equipment details:

Date of Manufacture: October 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Boise, United States

Available date: 10/30/2023

  • AGS and AMS servers for library file generation for product is not included.
  • Thin film capable with D2 option down to 190nm.
Software Version6.20.31.1106
System Power Rating230vac
Loading ConfigurationDouble EFEM - 2 LP
Tool under OEM service contract?   Yes




Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.