Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

KLA-Tencor Corp. SpectraShape 8660

Asset ID: 209680

Print spec sheet

KLA-Tencor Corp.

SpectraShape 8660

Optical Review System

Metrology Equipment

Equipment details:

Date of Manufacture: Mar-2013

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

METROLOGY 15-3KLA_SS8660_OCD_01 KLA TENCOR SS8660 OCD

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.


OEM  KLA
Tool Model  SS8660
Process  SCATTER
Software Version (include revision #) 6.20.31.11006
System Power Rating  200V AC 1-Phase
Loading Configuration  3 load ports
Description     Qty
Tool:      
Process Unit:  Model:Remark  
Controller:  Robot/Stage- Robot:1/Stage:1
MFC/Pressure Unit:  N/A   
Drive Mechanisms:  Power/CDA/VAC- Power:1/CDA:2/VAC:3
FOUP Opener:  Sinfonia- 3
Power Cable 3m over
Safety:
Recessed EMO
Panel interlock


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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