Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal

Asset ID: 209805

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2/10

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Software Version (include revision #) AMS 2.8_82                         

System Power Rating 208VAC 3-Phase                

Loading Configuration   2 Carrier Stage              

 Vendor Chm Model

Chm/Unit Position 1 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43

Chm/Unit Position 2 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43

Chm/Unit Position  3 Centura Asp CF4/O2/N2   

Chm/Unit Position  4 Centura Asp CF4/O2/N2   

Process Unit:Advantedge G5       Model:Centura Remark

Controller:

MFC/Pressure

 Unit: MILLIPORE IntelliFlow(DeviceNet)

Drive Mechanisms:GUI PC

FOUP Opener: ADO

Gas System:Device Net 

Exhuast System:TMP/Pump       

Main AC Rack

Secondary AC Rack

IPUP

WFIB

Endpoint stand

Monitor stand

Side strage Left

Side strage Right

Main frame

DPS G5

Asp

FI

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