Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

LAM Research 2300 KIYO MCX

Asset ID: 207121

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LAM Research

2300 KIYO MCX

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Tool Status: Shut down. This tool has been harvested and is not guaranteed to be complete, and the Fab is unable to provide a list of missing/needed components.  The config provided for the tool is how we purchased the tool and no upgrades/mods were performed post-purchase.


Configuration: Audit to verify.


Tool is a 4-chamber KIYO2300 system on a V2 platform. 



Software Revision 1.7.3 and above 
Factory Automation OHT PIO Sensor 
AMHS AMHS - OHT or manual delivery - Factory Interface 


Carrier FOUP (Comply with SEMI E47.1 (25wafers)) 
Inter Face 3 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies 
Online Connection GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx) 
Platform Type Version 2 
UPS on system UPS Wiring 
Earth Leakage Breaker ELB 
Monitor 2 (Flat Panel Display, 1; Front, 1; Side) 
Signal Tower Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1) 
EMO Front x2, Rear x6 
Conditioning Station - A Conditioning Station - A 
Conditioning Station - B Conditioning Station - B 
Foreline Heated 
Sub-panel Dual Drop Sub-panel Remote Power Distribution Box (RPDB) 
Interconnect Cables TM to sub-panel, 50 ft 
Pump to TCU 50 ft 
TCU to PM 50 ft 
Pump to PM 50 ft 
PM to Gas Box 16 ft 
TCU to RPDB 50 ft 
Pump to RPDB 50 ft 
Inter Locks Gas Box Door (I/L Signal is sent to the Factory) 
Inter Locks External (When the I/L signal is received from Factory, gas valves are closed) 
Front Fascia Bulkhead Configuration 
Chiller Lower ATS Dex 20A 
Coolant FC3283 
Chiller Hose 5/8 ID Braided 
RF Generator Bias RF GENERATOR,13.56MHZ,1.5KW,PULSE 
RF Generator Source GEN,APEX,1.5KW,13.56MHz,F47,H,P4,-2000Hz 
8 ft Bias RF Pulsing Cable CA,COAX,RF,HN-90, 8ft BIAS 
RF Source Cable 21 Feet CA,COAX,RF,HN-90,TO,HN-90,21FT 
Bias Match (FRU) FRU,ASSY,BIAS MTCH,2300 FOR SAMPLE/HOLD 
TCP Match (FRU) CONTA,ENCL,TCCT CER,2300 
Coil Assembly ASSY,TCP COIL,TCCT CER,2300 
VCI ASSY,VCI 2300 20-800V,DUAL,FAST,PULSE 
PCB ASSY,PCB,PWR SPLY,ESC,BICEP,HV-RP 
PCB PCBA,ESC FILTER, BICEP DC-PROBE 
PCB ASSY,PCB,HEATER FILTER 
PCB PCBA,VIOP III BOARD 
PCB CPU PCB 
PCB SPCTRMTR,FIBEROPTIC,LOW 2ND ORDER 
Wafer ID Reader WIDS Bottom Read 
Carrier ID Reader Asyst RF Advantag 
EIM Server EIM Server-One EIM server per 10 frames with additional primary EIM server. 
Process Chbr 1,2,3,4 2300 Kiyo 
ESC, Assy ESC,TUNABLE,COUL,CNTR RF,300MM 
ESC RF Grounding Strap ESC RF Grounding Strap 
AC Box ASSY,ENCL,AC,2300 PM,4-ZONE,ESC 
TMP PMP,VAC,TURBO,2.7K L/S,ISO 250,ROHS 
Dry Pump Adixen (Alcatel) A1003P 
Transfer Module Backing Pump EPX with N2 Gas Module 
RCKR VLV RCKR VLV Longer Life Air Cylinders 
Pressure Monitor MNMTR,ETCH,100MT 
Pressure Monitor MNMTR,2STPT,100 DEG C,KF16,10T 
Pressure Monitor MNMTR,2STPT,100 DEG C,KF16,10T 
Pressure Monitor SW VAC 75 TORR 
Pressure Monitor SWITCH, ATMOSPHERIC W/.25ID 
Pressure Monitor CNTRLR,FLOW AND PRESSURE,649A 
O-Rings Chemraz 
Chamber Isolation Valve Barrier Seal Door 
VAT Valve O-rings Valqua 
Wafer Lift Mechanism Prime Movers With Pin Speed Mod 
RF Ground Bracket BRKT,RF GND,BIAS ELECT ASSY 
ESC Hose Kit Low Temp 
TCW Kit KIT,WINDOW,TEMPERATURE CONTROL 
TCW Kit PCBA,ASSY,PCB,OT MODULE 
Gas line 1 SiCL4 100 sccm- STEC Z313 
Gas line 2 BCL3 300 sccm STEC Z313 
Gas line 3 CL2 500 sccm- STEC D213 
Gas line 4 HBr 500 sccm- STEC D213 
Gas line 5 CF4 400 sccm- STEC D213 
Gas line 6 O2 500 sccm-STEC D213 
Gas line 7 Empty (for future use) 
Gas line 8 He 500 sccm- STEC Z313 
Gas line 9 Empty (for future use) 
Gas line 10 CH2F2 200 sccm- STEC D213 
Gas line 11 Ar 1000 sccm- STEC D213 
Gas line 12 HeO2 (30% O2) 50 sccm- Z313 
Gas line 13 NF3 1000 sccm- STEC D213 
Gas line 14 N2 (Process Grade) 250 sccm- STEC Z313 
Gas line 15 Empty (for future use) 
Gas line 16 SO2 200 sccm- STEC Z313 
Purge N2 (Process Grade N2) (Customer Supplied) 
Filter Final gas : Mykrolis (P/N WG2FT1RR2) 
Filter FLTR,Wafergard,PTFE,VCR,MALE 
Gas Box Inlet Option Regulated Inlet Gas Panel 
Non-standard PM/GB Feature IGS GAS BOX/ with GIB option 1-16 Hasteloy single lines 
Gas Line Pressure Transducer Active pressure transducer WITHOUT digital readout. 
Regulator SQMICRO (VERIFLO) RGLTR_DM_S__NI FLTR_60 PSIG_5RA 
Piping Single Contain-Hasteloy, Gas box to Final valve & Exhaust through Gas box) 
Final Pressure Switch SW,PRESS,400 Torr decreasing 
Heated Lines Lines 1 & 2 heated 
LIN,SYM,HI FLOW LIN,SYM,HI FLOW 
KIT,LINER AND DOOR KIT,LINER AND DOOR 
WDO,CER,LLT,CTD,BAYONET,2300 WDO,CER,LLT,CTD,BAYONET,2300 
RING,EDGE,TOP,CER,EBP,300MM RING,EDGE,TOP,CER,EBP,300MM 
RING,EDGE,BOT,CER,200-300MM RING,EDGE,BOT,CER,200-300MM 
WDO, SAPPHIRE, 25MMX.087 WDO, SAPPHIRE, 25MMX.087 
INJ,DUAL,FACSEAL,IEP,HNYCMB,CE INJ,DUAL,FACSEAL,IEP,HNYCMB,CE 
SHLDASSY,INJ SHEILD NUT,BAYONE SHLDASSY,INJ SHEILD NUT,BAYONE 
WDO, QUARTZ WDO, QUARTZ 
Top Chamber ACME Coated Top Chamber ACME Coated,TCW 
WLDMT,INTFC,CHMBR SEPERATE,NOZ WLDMT,INTFC,CHMBR SEPERATE,NOZ 
Insulator Ring: Ceramic Insulator Ring: Ceramic 


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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