Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal

Asset ID: 205113

Print spec sheet

Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: December 25, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Software Version (include revision #)      AMS 2.8_82                   

System Power Rating                              208VAC 3-Phase                           

Loading Configuration                            2 Carrier Stage               

                                       Vendor Chm Model                     

Chm/Unit Position  1     Centura G5             BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43

Chm/Unit Position  2     Centura G5             BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43

Chm/Unit Position  3     Centura Asp     CF4/O2/N2       

Chm/Unit Position  4     Centura Asp     CF4/O2/N2       


Tool has been de-installed and is stored in an off-site warehouse.


Shipping kits have been installed a FI unit only.

The shipping kits are required to be shipped back to Fab15.



Missing or damaged parts:


Qty 3 of SINGLE RING QUARTZ .50 HEIGHT 300MM HTD ESC (Consumable items) are missing.


No other missing or damaged parts. Fab15 confirmed it.


Tool is configured with endpoint.

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