Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Novellus Systems Inc. Concept Three Speed MAX Lite

Asset ID: 19655

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Novellus Systems Inc.

Concept Three Speed MAX Lite

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool ModelC3 SPEED MAX LITE 
ProcessSTI OXIDE DEP2 


 
Software Version 5.73B39 
System Power Rating208 AC 3-Phase 
Loading Configuration3 load port 
Chm/Unit Position  1C3 SPEED MAX LITE CHA N2,AR,O2,He,SiH4,H2,NF3
Chm/Unit Position  2C3 SPEED MAX LITE CHB N2,AR,O2,He,SiH4,H2,NF3
Chm/Unit Position  3C3 SPEED MAX LITE CHC N2,AR,O2,He,SiH4,H2,NF3


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