Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

KLA-Tencor Corp. ASET-F5x

Asset ID: 205610

Print spec sheet

KLA-Tencor Corp.

ASET-F5x

Film Thickness Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


SW Version: SUMMIT Software Revision 5.30.33 

Wafer Size: 300mm SEMI Notch

Carrier

- Two PIO devices for OHT 

- ASD GEN3 Dual FIMS 

- Asyst Advantag 9100 CID

Interlocks: Panel interlock


Facilities

- Power: 208 VAC, 3W-N

- Vac: 20-25 inHg 1SFCM

- CDA: 90-100psi 1SFCM


Integrated Mini-Environment.: Included

Computer system: Microsoft Windows XP Professional, Version 2002, Service Pack 2. Intel Pentium 4 CPU 2.80GHz RAM:1.00GB


HSMS / GEM SEMI E37 compliant Ethernet interface

- GEM/SECS and RS232

- GEM/SECS and HSMS

- E84 enabled for OHT & AGV/RGV

- E87 (Based on E39)

- E40/E94/E90

- 4 Color Light Tower (R,A,G, B)

Software: N/A

Interface: DVD; FDD; Ethernet port; USB

HW: FFU; Utility Panel

Option: N/A


Damage/Missing parts list

Damage- key board fixed frame (refer to photo)

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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