Macquarie Equipment Trading on behalf of Micron Technology, Inc. (Boise)

Alcatel A1503H

Asset ID: 206108

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Alcatel

A1503H

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Location of Equipment: Boise, United States

Available date: Currently Available

Tool Status: Pump has been shut down, disconnected, and moved to the warehouse.


Configuration. Audit to verify.


Pump has not been refurbished and is not skidded or crated.


Technical Specifications

Peak pumping speed 50Hz : 19200 l/min

Peak pumping speed 60Hz : 21667 l/min

Ultimate pressure Max (No Purge) 50Hz : 1.5x10-3 torr

Ultimate pressure Max (No Purge) 60Hz : 6.7x10-4 torr

Ultimate pressure Max (50 SLM Purge) 50Hz : 6.7x10-3 torr

Ultimate pressure Max (50 SLM Purge) 60Hz : 4.5x10-3 torr

Motor rating : 6.5 kw

Max continue inlet flow : 100 SLM

N2 purge flow : 15 – 120 SLM

Cooling water : 1.3 l/min

Inlet connection : DN100

Outlet connection : DN40

Dimensions : L988 x W390 x H986 mm

Max sound level : < 69 dBA

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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