Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 7/23/2021
Process: CUOX
Tool config is based on original PO, please verify tool details at tool inspection
STANDARD SPECIFICATIONS
Software Revision : VERSION 2.3_43
FI Software: B4.30_11
GEM SEC Revision: B7.10_21
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Load Port: 3 Loadport
Facility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switch
Facility plate: Manual Valve : Supplied by IMI in floor
Facility plate: Pressure Gauge
Loader Module Corrosion Prevention: TDK Corrosion Resistant
Loadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187
Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187
Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249
Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWER
EMO: Front x3, Rear x4
Cable Length: Monitor 1/2 cables : 15 ft/50ft
Cable Length: Pump Cable : 75 ft
Monitor: Monitor-1 : Flat Panel with Keyboard on STAND
Monitor: Monitor-2 : Remote Flat Panel on STAND
IPUP: Alcatel IPUP
HARDWARE CONFIGURATION
Chamber type: CT- Qty 4
CHAMBER CONFIGURATION
Process kits : Qt/Si
Gas inject : 3.5 anodized SGD
chamber O-ring: chamraz513
Turbo pump: Dual Alcatel 1600
RF match: DAIHEN
RF generator: ENI GHW 50
EPD windows: Quick remove released quartz
CM Test port: 1/2 VCR&KF25 Dual
RGA Port: RGA port W mech valve
Endpoint Type: H.O.T ENDPOINT
Endpoint Wavelength 1: CO 484 NM
Endpoint Wavelength 2: CN 387 NM
Cathode Temperature Monitor: YES
ESC Power Supply: CT HV POWER SUPPLY
RF Feed: DIRECT CT CATHODE
Dry pump: EABARA-ESR80WN
Wall chiller: SMC-H2010
Cathode chiller: SMC-INR 496-003D
Coolant: HT110
ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IA
Liner: CT LINER
PROCESS GAS BOX CONFIGURATION
Gas Name: MFC Type-Size
C4F6: FC-PN980CR1BA-150
CO: FC-PN980CR1BA-500
CH2F2: FC-PN980CR1BA-50
N2: FC-PN980CR1BA-200
O2_2000: FC-PN980CR1BA-2000
O2_200: FC-PN980CR1BA-200
CHF3: FC-PN980CR1BA-200
C4F8: FC-PN980CR1BA-50
CF4: FC-PN980CR1BA-300
AR: FC-DN780C-BA-300
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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