Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Tokyo Electron Ltd. (TEL) Unity Me 85 DRM

Asset ID: 211144

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Tokyo Electron Ltd. (TEL)

Unity Me 85 DRM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2013

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Korea, Republic of

Available date: TBD

Unity Me Mainframe

Transfer Robot: Yaskawa Electric XU-BDB1300

Qty 1 - DRM Process Chamber

Bottom Electrode: 1D10-150053-11

Upper Electrode: 1D10-204338-13

Focus Ring: 1D10-350791-11

Plate Baffle: 1D10-102848-13

Shield Depo: 1D10-315183-15

Ring Insulator: 1D05-300354-11

Cover Bellows: 1D10-204418-12

Turbo Pump: STP-A1303W1

Process Gases: C4F8, O2, Ar, He, CHF3

Qty 1 - RF Rack

ENI GHW-25A

Qty 1 - Monitor Panel

Qty 1 - AC Rack

Qty 4 - Dry Pumps

Lot Vacuum HD120

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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