Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 Exelan Flex

Asset ID: 211039

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LAM Research

2300 Exelan Flex

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 4/21/2023


Tool config is based on original PO, please verify tool details at tool inspection


Model No. 2300

FI SN: 1017439-10-19-0615

Model No. 2300 EXELAN/ 2300 EXELAN FLEX

Ch1 SN: 23EX-2482(F128232-PM1)

Ch2 SN: 23EX-2483(F128232-PM2)

Ch3 SN: 23EX-2484(F128232-PM3)

Ch4 SN: 23EX-2485(F128232-PM4)


Process: CUOX

Software Version: 1.8.4 SP8-HF4

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 Load ports


Chm/Unit Position 1: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2

Chm/Unit Position 2: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2

Chm/Unit Position 3: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2

Chm/Unit Position 4: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2


Standard Specs

Software Revision: 1.8.4-SP11-HF5

Factory Automation: OHT PIO Sensor

AMHS: AMHS - OHT or manual deliver - Factory Interface

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 3 carrier stage (Continuous flow operation)

Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)

Interface A: Hardware related to EDA Note: This is a cost option.

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Platform Type: Version 2

UPS on system: Yes

Earth Leakage Breaker: Yes (for Fab 3 only)

Gas Box: Transport Module, GIB for 16 lines IGS GBX

Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)

Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)

EMO: Front x2, Rear x6

Conditioning Station: No

Foreline: Not Heated

Sub-panel: Dual Drop Sub-panel Remote Power Distribution Box (RPDB)

Interconnect Cables: TM to sub-panel, 50 ft

Pump to TCU: 50 ft

TCU to PM: 50 ft

PM to Pump Interconnect: 50 ft

Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)

Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed)


Support Remote Units

Chiller Lower: CTC YR-8020

Coolant: HT-110

Chiller Hose: 5/8 ID Braided Stainless Flex

RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC

Wafer ID Reader: No WIDS Bottom Read

Carrier ID Reader: Asyst RF Advantag

EIM Server: EIM Server-One EIM server per 8 frames


Hardware Config

Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)

25 Wafer Input Buffer Station: VTM 25 Slot Buffer-Lwr Align

25 Wafer Input Buffer Station: VTM 25 Slot Buffer-Lwr Aux

Endpoint type: Optical Emission Spectroscopy

ESC type: Dual Zone/Flex Bipolar

Gap: 2.34 cm

TMP: TMP-Edwards 1603

Dry Pump: Ebara -AA100

Transfer Module Backing Pump: EPX with N2 Gas Module

Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr

Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr

Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr

Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001

Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14

Upper Electrode: Heated Constant Temperature Control

Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode

O-Rings: FluoroSilicone

Chamber Isolation Valve: Barrier Seal Door

Wafer Lift Mechanism: 2-stage lifter


Gas Position

Gas line 1: C4F8 50 sccm-HORIBA SEC_Z300

Gas line 2: C4F6 100 sccm- HORIBA SEC_Z300

Gas line 3: CHF3 100 sccm- HORIBA SEC_Z300

Gas line 4: CF4 300 sccm-HORIBA SEC_Z300

Gas line 5: CF4 1000 sccm- HORIBA SEC_Z300

Gas line 6: O2 150 sccm- HORIBA SEC_Z300

Gas line 7: CH2F2 100 sccm- HORIBA SEC_Z300

Gas line 8: 30%O2/He 100 sccm-HORIBA SEC_Z300

Gas line 9: H2 500 sccm- HORIBA SEC_Z300

Gas line 10: Ar 1000 sccm- HORIBA SEC_Z300

Gas line 11: N2 1500 sccm-HORIBA SEC_Z300

Gas line 12: O2 3000 sccm- HORIBA SEC_Z300

Gas line 13: NA

Gas line 14: NA

Gas line 15: NA

Gas line 16: NA


Gas Box Config

Purge: N2 (Process Grade N2) (Customer Supplied)

Filter: Final gas : Mykrolis  (P/N WG2FT1RR2)

Gas Box Inlet Option: Regulated Inlet Gas Panel

Non-standard PM/GB Feature: Stone Henge Gas Box / with GIB Option 16 lines single contained Hasteloy lines.

Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout

Regulator: SQMICRO (VERIFLO)

Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)

Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003


Critical Parts

Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M

Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM

Upper Quartz Ring: Ring, QTZ,COVER BKG PL,UPR ELCT

Q-Pad Kit: inner UE shim ( 857-072806-005) & outer UE shim (713-072792-003) ,TCP上的shim(857-073299-001+714-069935-003)

Al Backing Plate: TALON ALUMINUM BACKING PLATE

Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone

Dual Zone ESC: ESC,IBP,DZ,FLAT,2-SNSR,FLEX

CERAMIC COUPLING RING: RING,COUPLING,CERAMIC,W/FLAT,300MM

Edge Ring Cover (In): COV,H/E RING,QTZ

Focus Cover Ring: B,FOCUS R CVR,DFC 300MM

Silicon hot edge ring: RING,HE,4XX ESC,W/FLAT,300MM

Edge Ring Cover (Out): RING,COVER,OUTER,GND

Landing pad: PED,LNDNG.CONF R,PEEK,F60FLEX

Ground Shield: SHLD,GND,300MM,2300

Liner: LINER/SPCR,EXT GND RING,2.350C

OPCR ( One Piece Confinment Ring ): RING,WAP,17.07X2.155THK,300MM 

Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK

Spares: Clean kit (2), and Pendulum Valve Clean Kit(2)

Fixtures, Jigs.: Provide necessary fixtures and/or jigs including: ladder for MFC change (1 per every 5 tools) turbo pump jack (2 pcs in total)

TEF gasket: GSKT,OUTER,GAS FEED,DUAL ZONE

TGV assembly: GTV,CONT,200MM FLG,SER 65

partition ring: RING,PTN,GAS FEED, DUAL ZONE

Lift Pin: ASSY,BLWS,WAFER LIFT

ESC Power Supply Board: ASSY,PCB,PWR SPLY,ESC,BI

DC Power Supply: ASSY,ENCL,DC CONT

2-stage lifter: AIR CYL,2-STG, 7+12.5MM, HIGH T


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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