Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Applied Materials (AMAT) Producer Etch XT Dielectric

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Asset ID: 16107

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Applied Materials (AMAT)

Producer Etch XT Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: TBD

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available


System:EKA101
Project:414248
MES:APOXL10100
Mainframe Type: Platform:Producer eXT MF
SW Version:B3.1_65

Server Type
FE:306M
FI:306M
RT:SBC

Chamber Type
A:Twin- (EO2) DIELECTRIC ETCH TWIN XT
C:Twin- (EO2) DIELECTRIC ETCH TWIN XT

Customer ID:EKA101
Project ID(AMAT):414248NSO
Warranty end date: 01/28/09
Application (Process):Oxdie
FI robot Type:YASKAWA AT
Robot P/N: 0190-14738
Controller P/N: 0190-27387
Robot Type:VXP
Materials:Aluminum
Robot P/N:0010-30160
Controller P/N:0190-10119 / 0190-10118
 

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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