Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Telius SP-305 SCCM

Asset ID: 13457

Print spec sheet

Tokyo Electron Ltd. (TEL)

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool ModelSCCM 
ProcessOxide 
Sending Site Workstation Name11-3TEL_SCCM_OX 
Software Version (include revision #)Linux 5.50 Rev 001 
System Power Rating208 AC 3-Phase 
Loading Configuration4 Load ports 
Chm/Unit Position   1SCCMC4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position   2SCCMC4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position   3SCCMC4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position   4SCCMC4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6


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