Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

LAM Research 2300 Exelan Flex EX

Asset ID: 12669

Print spec sheet

LAM Research

2300 Exelan Flex EX

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


Serial number F148255 on Chamber 2

Serial number F148256 on Chamber 3

Serial number F148261 on Chaber 2


[Chamber A]

Chamber type:Flex

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)

Source 27MHz 3000W/2MHz 5000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃


[Chamber B]

Chamber type:Flex

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)

Source 27MHz 3000W/2MHz 5000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃


[Chamber C]

Chamber type:Flex

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)

Source 27MHz 3000W/2MHz 5000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃


Other missing or damaged parts: Not reported.

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.