LAM Research 2300e4 Exelan Flex DX

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

1. 2300e4 Platform 

1 * 3 FOUP TDK 

3 * Hermes Carrier ID 

1* Light Curtain w/ OHT/RGV

1* 25 Slot Input Buffer Station

1* WIDS Btm Read

1* Conditioning Station (7 Wafer)

1* User Interface: Side and Front Monitor U

1* System UPS Circuitry

1* Earth Leakage Breaker

1* Cable: TM-Subpanel, 100ft

1* Signal Light Tower, R-O-G-B Slim Line 

1* Sys Calibration and Alignment

1* VTM Breakout Board/Cover

1* NSR 101271,input buffer stat anti-corros

1* NSR100301, SST Gas Filter

1* Software Variable ID (Sensor Box) 

1* Robot CDM 

1 * Light Tower Buzzer 

1 * APCS 

1* Metric to Inch Conv. Fittings 

1* 25 Slot Aux Buffer (Corr Res) 

1* VTM Pump: Edwards (EPX) 

1* Vespel Single Sense 

1* NSR10702, N2 Flow Monitoring on UPC 

1. 2300 PROCESS MODULE(2300 FLEX D Series Options)

3* 4XX Series ESC

3* PM Facilities: Dual w/ Temp Monitor 

3* 10 GPM Flow Meter 

3* 60 MHz Generator 

3* Polished Hardware Finish 

3* Dual Zone ESC Cooling -Flex D Series 

3* Heated Foreline Manometer 

3* Interconnect Hardware: Pump to TCU 100ft 

3* Interconnect Hardware: TCU to PM 100ft 

3* Interconnect Hardware: Pump to PM 100ft 

3* EMO Cable: TCU to RPDB 50ft

3* EMO Cable: Pump to RPDB 50ft

3* NSR10508, Shaft Seal for TCU hose fittin 

3* NSR10061, High Pressure Coolant hose FOX 

1* 2300 Flex D Series Quick Clean Kit 

1. 2300 GAS BOX

3* 2300 FLEX D SERIES JETSTREAM 

30 * Jetstream Gas Line 

6* Heated Gas Line 

1* Facility Interface Box (System)

17 * Facility Interface Box (Per Line) 

1* Future PM Containment 

1. 2300 PERIPHERALS

1 * Dual Drop Subpanel (2 Ch TCU) 

1. 2300 SHIP AHEAD

1* Standard Ship Ahead Items

1. 2300 Software

1* TEK Software 

1* Wafer Flow Tuning 

1* APC Recipe Tuning Host

1* 2nd HSMS 

1* NSR8423, Hardware Firewall