Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Reflexion - Dielectric

Asset ID: 28212

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Applied Materials (AMAT)

Reflexion - Dielectric

Dielectric CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool Model Reflexion
Process Oxide
Software Version (include revision #)rp3B6.5_31
System Power Rating AC 208V 3-Phase
Loading Configuration 3 load port
1FI UNIT 
2CLEANER MODULE
3POLISHER MODULE
4ATS Chiller (SX-21 )


MISSING PARTS


DescriptionMissing (Qty)
PC1 DDF31
Platen moving cover1
PC1 pneumatic box cover1
PC3 pneumatic box cover1
P3 platen motor driver box cover1
Mega upper cover1
BB1 upper cover1
BB2 upper cover1
SRD upper cover1
Wet robot door cover screw8


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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