Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Base System
Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins: P1, P2, P3, and P4: FM4910 compliant.
Gap Wash: 120 degree nozzles
Load Cup Wafer Exchanger: Enhanced counter balance springs
Nova 3090 Ready: Nova 3090next
Monitor 1 Location: Cart
Monitor 2 Location: Ergo Arm type
Light Tower: Factory Interface and Polisher Sides
Software
LK Software: lp3B4.9_118
Factory Interface: fb4.9_14 Beta
ISRM / RTPC: isB3.3_28
RTPC: N/A
Interface "A": N/A
Nova 3090: v4.5R6b69
Wafer to Wafer iAPC: N/A
Within Wafer iAPC: B3.0 Beta
Factory Interface
WIP Delivery Type: N/A
FOUP: N/A
OHT Light Curtain: N/A
E84 PI O Sensors and Cables: N/A
E99 Carrier ID: N/A
Docked E99 Reading Capability: N/A
Docking Flange Shield: N/A
Frame Configuration: N/A
Load Ports: N/A
Load Port Operator Interface: N/A
Load Port Types: N/A
Operator Access Switch: N/A
Platen 1
Platen Type: STANDARD (<= 200 RPM)
Endpoint: Full Scan Optical ISRM
Endpoint: Motor Torque
High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min)
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Platen 2
Platen Type: STANDARD (<= 200 RPM)
Endpoint: Full Scan Optical ISRM
Endpoint: Motor Torque
High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min)
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint: Full Scan Optical ISRM
Endpoint: Motor Torque
High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min)
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Polisher
Polisher Technology: SLURRY AND PAD
Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)
Cross Break: N/A
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean: No
ISRM Laser Key Switch: N/A
Slurry Delivery System: P1~P3*4
Head 1 Power Cable: 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF
Head 2 Power Cable: 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF
Head 3 Power Cable: 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF
Head 4 Power Cable: 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF
Head 1 Encoder Cable: 0150-16281 CABLE ASSY, 300MM, HR1, DRIVER-RESOLVER
Head 2 Encoder Cable: 0150-16282 CABLE ASSY, 300MM, HR2, DRIVER-RESOLVER
Head 3 Encoder Cable: 0150-16283 CABLE ASSY, 300MM, HR3, DRIVER-RESOLVER
Head 4 Encoder Cable: 0150-16284 CABLE ASSY, 300MM, HR4, DRIVER-RESOLVER
SMC UPA: SMC UPA
SMC UPA: SMC UPA
Cleaner Meg
MEGASONICS: N/A
Transducer: N/A
Chemical 1: CLC 1250 ml/min
Brush Box 1
Brush LDM Type: TwoChemInLineMixed
Chemical 1: CLC 1250 ml/min
Brush Box Level Spacer: N/A
Brush Box Shaft: N/A
Toe In: N/A
Slow drain: N/A
Brush Box 2
Brush LDM Type: TwoChemInLineMixed
Chemical 1: 0-1250ml/min
Brush Box Level Spacer: N/A
Brush Box Shaft: N/A
Toe In: N/A
Slow drain: N/A
Dryer Module
Dryer Type: VAPOR DRYER
Recovery Module: N/A
Output Station Dampner: Cap is Delrin and shaft is Stainless
Damage/Missing parts list
Missing- P1 platen Iron plate cover lose- Qty 1
Missing- P2 platen Iron plate cover lose- Qty 1
Missing- P3 platen Iron plate cover lose- Qty 1
Missing- slurry inlet manifold lose- Qty 2
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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