Applied Materials (AMAT) Reflexion LK Oxide

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Base System

Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.

Polisher Skins: P1, P2, P3, and P4: FM4910 compliant.

Gap Wash: 120 degree nozzles

Load Cup Wafer Exchanger: Enhanced counter balance springs

Nova 3090 Ready: Nova 3090next

Monitor 1 Location: Cart

Monitor 2 Location: Ergo Arm type

Light Tower: Factory Interface and Polisher Sides

Software

LK Software: lp3B4.9_118

Factory Interface: fb4.9_14 Beta

ISRM / RTPC: isB3.3_28

RTPC: N/A

Interface "A": N/A

Nova 3090: v4.5R6b69

Wafer to Wafer iAPC: N/A

Within Wafer iAPC: B3.0 Beta

Factory Interface

WIP Delivery Type: N/A

FOUP: N/A

OHT Light Curtain: N/A

E84 PI O Sensors and Cables: N/A

E99 Carrier ID: N/A

Docked E99 Reading Capability: N/A

Docking Flange Shield: N/A

Frame Configuration: N/A

Load Ports: N/A

Load Port Operator Interface: N/A

Load Port Types: N/A

Operator Access Switch: N/A

Platen 1

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) 

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water

Platen 2

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) 

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water

Platen 3

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) 

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water

Polisher

Polisher Technology: SLURRY AND PAD

Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)

Cross Break: N/A

Pad Wafer Loss Sensor: DARK PAD SENSOR

InterPlaten Clean: No

ISRM Laser Key Switch: N/A

Slurry Delivery System: P1~P3*4

Head 1 Power Cable: 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF

Head 2 Power Cable: 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF

Head 3 Power Cable: 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF

Head 4 Power Cable: 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF

Head 1 Encoder Cable: 0150-16281 CABLE ASSY, 300MM, HR1, DRIVER-RESOLVER

Head 2 Encoder Cable: 0150-16282 CABLE ASSY, 300MM, HR2, DRIVER-RESOLVER

Head 3 Encoder Cable: 0150-16283 CABLE ASSY, 300MM, HR3, DRIVER-RESOLVER

Head 4 Encoder Cable: 0150-16284 CABLE ASSY, 300MM, HR4, DRIVER-RESOLVER

SMC UPA: SMC UPA

SMC UPA: SMC UPA

Cleaner Meg

MEGASONICS: N/A

Transducer: N/A

Chemical 1: CLC 1250 ml/min

Brush Box 1

Brush LDM Type: TwoChemInLineMixed

Chemical 1: CLC 1250 ml/min

Brush Box Level Spacer: N/A

Brush Box Shaft: N/A

Toe In: N/A

Slow drain: N/A

Brush Box 2

Brush LDM Type: TwoChemInLineMixed

Chemical 1: 0-1250ml/min

Brush Box Level Spacer: N/A

Brush Box Shaft: N/A

Toe In: N/A

Slow drain: N/A

Dryer Module

Dryer Type: VAPOR DRYER

Recovery Module: N/A

Output Station Dampner: Cap is Delrin and shaft is Stainless

Damage/Missing parts list

Missing- P1 platen Iron plate cover lose- Qty 1

Missing- P2 platen Iron plate cover lose- Qty 1

Missing- P3 platen Iron plate cover lose- Qty 1

Missing- slurry inlet manifold lose- Qty 2

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales