Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
A Hard Disk Drive will be removed from tool.
[Platen1]
30inch platen
(max133rpm)
4inch pad conditioner
(DDF3type,30-120rpm)
slurry line1:D4505
(max400ml/min)
(tube pump)
torque end point system
[Platen2]
30inch platen
(max133rpm)
4inch pad conditioner
(DDF3type,30-120rpm)
slurry line1:D4505
(max400ml/min)
(tube pump)
torque end point system
[Platen3]
30inch platen
(max133rpm)
4inch pad conditioner
(DDF3type,30-120rpm)
slurry line1:D4505
(max400ml/min)
(tube pump)
slurry line2:PL-6501
(max400ml/min)
(tube pump)
torque end point system
[Head1]
membrane press head
(3zone 0-15psi)
head spindle
(max200rpm)
[Head2]
membrane press head
(3zone 0-15psi)
head spindle
(max200rpm)
[Head3]
membrane press head
(3zone 0-15psi)
head spindle
(max200rpm)
[Head4]
membrane press head
(3zone 0-15psi)
head spindle
(max200rpm)
[Cleaner1]
megasonic 2roller+1idler
circulating DIW flow
(2.0l/min)
control temp
(20-50deg)
megasonic power
(950kHz,600w)
wafer rotation speed
(6rpm)
[Cleaner2]
2brush 3roller+1idler
rotation speed
(brush:max700rpm)
(wafer:max50rpm)
DIW delivery
(DIW:2000ml/min)
chemical delivery
(NH4OH:2000ml/min)
brush rinse
(DIW:1000-4000ml/min)
[Cleaner3]
2brush 3roller+1idler
rotation speed
(brush:max700rpm)
(wafer:max50rpm)
DIW delivery
(DIW:2000ml/min)
chemical delivery
(FPM:2000ml/min)
brush rinse
(DIW:1000-4000ml/min)
[Dryer]
spin rinse dryer
(max:2500rpm)
ramp heater
(1000w infrared heater )
[load port]
3load port
INLINE METROLOGY (NOVA3060) IS NOT INCLUDED IN TOOL.
Other missing or damaged parts: Not reported.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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