KLA-Tencor Corp. AIT UV

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.

Inspect to confirm configuration and condition.

Equipment configuration ：ASYS S3 loadport*2 & Inspection unit*1 & Pillar*1

The equipment already de-hookup and store in fab temporary area.

Unable to take photo of the tool due to stored at one corner pack with other tools.

General System Info

Equipment ID: CUDDFINP-01

Date of Audit: Feb-2022

Serial Number: UV1041

Original Ship Date from KLA: 2006

Wafer Size (inches): 12

Loading Configuration: FOUP

Number of Cassette/FOUP Positions: 2

Software Version: 6.3.89.5

Login User ID: NA

Login Password: NA

Electrical Requirements: NA

Is System On-Line?: No

Off-Line Date (if applicable): NA

CE Mark Certified?: No

Date of Last PM: NA

Date of Last Laser Change: NA

OEM Audit Available?: No

Can Produce Wafers AS IS?: No

Any Known Field Modifications?: No

All Cables Present?: NA

System Configuration

Main Platform: Fusion UV

Key Common Options 

Clean Room Manuals: No

Standard Manuals: No

External Panels (Skins): Cleanroom White

Chuck Type: Universal Ceramic / Other

GEM/SECS Interface: Yes

AIT LUV Series Options 

Hierarchical Load Adaptive Thresholding (HLAT): No

Auto-Positioning System: No

iADC Processor: No

Internal Review – Optical Microscope 

Spot Optics (um): 3.5 um, 6 um

External Support Equipment

Laser Power Supply: Yes

Image Computer: Yes

Blower Box: Yes

Number of Blower Boxes: 1

Chiller Make/Model: KLA PILLAR

Damage/Missing parts list

Please inspect tool to reconfirm