Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: CUCMP
Tool config is based on original PO, please verify tool details at tool inspection
Base System
Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins : Dark P1, P2, P3, and P4: 4910 compliant.
Gap Wash: 120 degree nozzles
Load Cup Wafer Exchanger: Enhanced counter balance springs
Nova 3090 Ready: None
Monitor 1 Location : Cart
Monitor 2 Location : Ergo Arm type
Light Tower: Factory Interface and Polisher Sides
Software
LK Software: lp3B4.5_29
Factory Interface : fb4.9_14 Beta
ISRM / RTPC: isB3.0_10
RTPC: B3.0_11
Platen 1
Platen Type : STANDARD (<= 200 RPM)
Endpoint : RTPC
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195 (4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water
Platen 2
Platen Type : STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water
Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min) F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Contro: l Platen Cooling Water
Polisher
Polisher Technology : SLURRY AND PAD
Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)
Cross Break: N/A
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean : No
ISRM Laser Key Switch: Y es
Slurry Delivery System : 4 x 12 CLC SDS
Head 1 Power Cable : 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF
Head 2 Power Cable : 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF
Head 3 Power Cable : 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF
Head 4 Power Cable : 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF
Head 1 Encoder Cable: 0150-16281C ABLE ASSY, 300MM, HR1, DRIVER-RESOLVER
Head 2 Encoder Cable: 0150-16282C ABLE ASSY, 300MM, HR2, DRIVER-RESOLVER
Head 3 Encoder Cable: 0150-16283C ABLE ASSY, 300MM, HR3, DRIVER-RESOLVER
Head 4 Encoder Cable: 0150-16284C ABLE ASSY, 300MM, HR4, DRIVER-RESOLVER
G4+ UPA : MKS UPA
G4+ UPA : SMC UPA
Cleaner Meg
Chemical 1:C LC 1-250 ml/min
Chemical 2:C LC 1-250 ml/min
Brush Box 1
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min
Brush box 2
Brush LDM Type: TwoChemInLineMixed
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min
Dryer Module
Dryer Type :VAPOR DRYER
Recovery Module: N /A
Output Station Dampner: Cap is Viton
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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