Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) Expedius

Asset ID: 209687

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Tokyo Electron Ltd. (TEL)

Expedius

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

WET 15-3TEL_EXP_LAL_2201L3 TEL EXPEDIUS LAL

Defective parts: one LAL(1) CIRCULATOR .

Missing parts : FAb15 confirmed there were no missing parts.​

Unit Diagram is Available.

OEM  TEL
Tool Model  EXPEDIUS
Process  Acid washing
Software Version (include revision #) 0323-0203 _ 2.2.0.7
System Power Rating  3Φ 200VAC Main、1Φ 200VAC UPS
Loading Configuration  2 LP
   Vendor Chm Model Chemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position 1  LAL1 LAL30 
Chm/Unit Position 2  OF1 DI 
Chm/Unit Position 3  LAL2 LAL30 
Chm/Unit Position 4  OF2 DI 
Chm/Unit Position 5  SD2 HF / IPA 
Main module LAL30     4
SD2 Module     1

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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