Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Quixace II Anneal

Asset ID: 19647

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Kokusai

Quixace II Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Process: ALDSIOX


Tool config is based on original PO, please verify tool details at tool inspection


Furnace Unit

Cartridge Heater:D4EX22250, RHC2 Heater

T/C for Heater Control:D4EX15442

T/C for Sub Heater Control

T/C for Over temperature Protection:D4EX15442

5-P T/C for Cascade Control:D4EX29950,L type(5P)

5-P T/C for Profile Control:OPTION

1-P T/C for Profile Control:D4EX21001,OPTION 

Thyristor Unit for Control:SKKT160L5Z4F-HKD,Air cooling type

 


Clean Unit

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)


Controller

Main Controller(OU):D4EX35757(CX5000)

Main Operation Unit:TM150-HKT02

Sub Operation Unit:D4EX35758 (KDSC-2005SUBDISP)

Process Module Controller:D4EX43195(PMC5000)

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02


Drive Mechanisms

I/O Shutter

AGV/PGV/OHT Stage

FOUP Loader

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer:Lift Transfer

Variable Wafer Pitch Converter

Boat Elevator

Boat Changer

Furnace Port Shutter

Boat Rotation

Broken Wafer Detector:OPTION

Wafer Transfer Crash Detector:OPTION

Tweezer Pitch check mechanism:OPTION


Gas System

Gas Unit(IGS):N2, NF3

Tape Heater for gas pipe


Exhaust System

Dry Pump& Mechanical Booster Pump:IH3030T, Made by EDWARDS/Prepared By User

Diaphragm Sensor (1000Torr):631C13TBEH, Made by MKS

Diaphragm Sensor (10Torr):631C11TBEH, Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA, Made by MKS

Main Valve:VEC-SHA8-X0326, Made by CKD

Exhaust Piping

Exhaust Dilution Line

Reactor Tube Press Leak Line

Back Ground Line: HCD, H2O, Catalyst, NF3

Jacket Heater for exhaust pipe:D4EX37739,Made by MKS

Seal Cap Heater:ESH-13049-02,Made by SHINWA VANES

Inlet Heater:D4EX33554,Made by TOKYO GIJUTSU

Cold Trap


Safety

Light Curtain System:SL-C52H, Made by KEYENCE


Other

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMJ-GB1, Prepared By User (E84 Sensor)

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER, Made by TOAMEC


Missing/Damaged Parts List:

Please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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