Kokusai Quixace II Nitride

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: NITR

Tool config is based on original PO, please verify tool details at tool inspection

Furnace Unit      

Cartridge Heater:D4EX30445-RHC-2 

T/C for Heater Control:D4EX15442   

T/C for Sub Heater Control:D4EX30655   

T/C for Over temperature Protection:D4EX15442   

5-P T/C for Cascade Control:D4EX22994-L Type

5-P T/C for Profile Control:OPTION

1-P T/C for Profile Control:D4EX21001-OPTION 

Clean Unit      

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)

Controller      

Main Controller（OU）:D4EX35757(CX5000)   

Main Operation Unit:TM150-HKT02   

Sub Operation Unit:KDSC-2005SUBDISP   

Process Module Controller:D4EX43195(PMC5000)   

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)   

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit   CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX   

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02

Drive Mechanisms   

I/O Shutter   

AGV/PGV/OHT Stage   

FOUP Loader   

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer:Lift Transfer

Variable Wafer Pitch Converter   

Boat Elevator   

Boat Changer   

Furnace Port Shutter   

Boat Rotation   

Broken Wafer Detector:OPTION

Wafer Transfer Crash Detector:OPTION

Tweezer Pitch check mechanism:OPTION

Gas System   

Gas Unit(IGS):SiH2Cl2, NH3, NF3

Tape Heater for gas pipe:SiH2Cl2 Line

Exhaust System      

Dry Pump& Mechanical Booster Pump:IH1800-HTX-Made by EDWARDS/Prepared By

User

Diaphragm Sensor (1000Torr):631C13T8FH,Made by MKS

Diaphragm Sensor (2Torr):631C02T8FH,Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA,Made by MKS

ATM SENSOR:"PA830 102G（SENSOR)

, PZ200（DISPLAY)"-"Made by COPAL

Main Valve:VEC-R-V80B0W2-400H,Made by CKD

Exhaust Piping

Exhaust Dilution Line

Reactor Tube Press Leak Line

Back Ground Line:SiH2Cl2, NH3, NF3

Jacket Heater for exhaust pipe:D4EX32782,Made by MKS

Seal Cap Heater   :SH-13049-02,Made by SHINWA VANES

Inlet Flange heater:D7EF78958,Made by TOKYO GIKEN

Inlet Port heater:ESH-12965-02, 

ESH-12966-01,Made by SHINWA VANES

Cold Trap

Safety      

Light Curtain System:SL-C52H, Made by KEYENCE

Gas Detector (NH3 Indicator/Detector):GD-K71D-R(NH3/75PPM), Made by Riken Keiki

Gas Detector (NF3 Indicator/Detector):GD-K77DG(NF3/30PPM), Made by Riken Keiki

Gas Detector

(SIH2CL2 Indicator/Detector): GD-K71D-R

(SIH2CL2/15PPM), Made by Riken Keiki

Other      

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMS-HB1-Z, Made by HOKUYO

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER-Made by TOAMEC

N2 Purge Load Lock System      

O2 Monitor / Detector:TF-21D201(RX-105063-A),Made by Energy Support

FOUP Opener N2 Purge SYSTEM, Made by Hitachi Kokusai

Loading Area MFC:HM5143B20AR, Made by Tokyo Keiso

Loading Area N2 Purge Line- Made by Hitachi Kokusai

FOUP Opener N2 Purge Line- Made by Hitachi Kokusai

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales