Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Aviza Technology, Inc. RVP-300

Asset ID: 10714

Print spec sheet

Aviza Technology, Inc.

RVP-300

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 10/15/2021

Process: ATMOXANNL

System, General Specification
Heater element Model: FURNACE,ATM –APL
Process Condition: AP
Maximum Operating Temperature: 1200c
N2 Load Lock: Yes
Wafer Type: 300 SEMI STD-Notch
Qty. of Production Wafers: 120 slots Ladder
Boat Operation: 2 Boat Type
Software Version: AVP 2.7.1 V

System, Furnace
Loading Area Light: White
Force Air Cooling system: installed
Side Maintenance: None
O2 Density control: 0-100ppm
N2 Boat shower wafer cooling: None
Furnace Temperature Controller: SSPC control

System, Wafer/Carrier Handling
Carrier Type: 12" FOUP
Carrier Stage Capacity: 16 FOUP
WTU Type: GenMark
WTU alignment: GenMark
WTU Teaching method: Pre-aligner / dual beam

System, Gas Distribution
IGS Maker / Type: Fujikin- None
IGS MFC Maker / Type: AERA- None
IGS Press Transducer Maker / Type: Mykrolis- None

System, Exhaust Specification
Vacuum Gage - 2 torr: AP tool - None
Vacuum Gage - 10 torr: AP tool - None
Vacuum Gage - 100 torr: AP tool – None
Vacuum Gage - 1000 torr: AP tool – None
Main Valve: AP tool – None
Pump Maker/Model: AP tool – None
Low vacuum valve: AP tool – None
Trap: AP tool – None
Vacuum Pressure Controller: AP tool – None

System, Reactor
Process Tube (LP): None
Outer/Inner Tube Material (LP): None
Inner Tube Type (AP): Quartz Single
Inner T/C: 12FT/HONEYWELL
Boat Materail/Type: Sic
Boat Rotation: None
Pedestal Materail/Type: Quartz
Auto Shutter: installed
System, Power Distribution
Voltage 3phase: 480VAC
Voltage Single-phase: None
Frequency: 60Hz

System, User Interface:
Operation Panel: Keyboard & Screen
Indicator Type: Mouse
Operation software type: Linux

Gas Leak Detector
Gas Leak Detector Materail/Type: GasTech

System, Fixture List, Gas
IGS maintenance Fixture: None
Vacuum Gauge: one

Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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