Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Axcelis Technologies Inc. Fusion 200PCU

Asset ID: 210185

Print spec sheet

Axcelis Technologies Inc.

Fusion 200PCU

UV Cure System

Resist Processing Equipment

Equipment details:

Date of Manufacture: 1999

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available



Inspect to confirm configuration and condition.

Is System On-Line? No

Off-Line Date (if applicable):2017/11

Can Produce Wafers As-Is ? No

CE Mark Certified ? Yes 

Are any Manuals included ? No

OEM Audit Available? Yes 

3rd Party Audit Available ? Yes 

Decontamination Report Exists? No

Any Field Modifications ? Yes  

All Cables present ? No

Any Corrosion visible on modules ? No

Any Missing / Damaged Parts ? Yes  

Shipping Brackets Included ? No

Handler Type:Cassette

Pre-Aligner ? No

Mini-Environment:No

Communication Interface:SECS

Supporting Equipment

Power Supply:N

AC Dist Box:N

Ext Transformer:N

UPS:N

Heat Exchanger / Chiller:N

Backing Pump(s):N

Facility Requirements

CDA:Y

DIW:Y

Vacuum:Y

Gas:N

Power:AC208V 60Hz 21A


Damaged parts as follows,

1.PWR SUPPLY ASSY-PCU 208V 60HZ(POWER BOX)

2.THERMOCHUCK ASSEMBLY

3.AXIS ROOT*3

4.Stage assy


Missing parts as follows,

1.PCB A801 CARD CPU

2.PWB ASY-WAFER

3.A807

4.PWB ASY-DUAL, CASSETTE HANDLER A805

5.ASSY, PWB ASY- M200PC CHUC K CONTRO

6.PCB 

7.A809

8.PWB ASY-640 X 480 GRAPHIC

9.BOARD,PWB ASY-3 AXIS ROBOT BASE

10.PWB ASY - WAFER DETECT 8"/ 25

11.KIT-AIR JET REPLACE LONG B

12.KIT-AIR JET REPLACE SHORTA

13.BULB

14.RF SCREEN

15.PWB ASSY M200PCU CHUCK CONTROL

16.ASSY, PWB ASY, CHUCK INT, 200PCU ON

17.LAMP

18.PHOTOCELL ASY-MOD M150


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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